Variable Orifice Valve Structure for High-Temperature Wide Conductance
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Solution Overview
Problem
Current variable orifice valves are limited to low conductance ranges and cannot operate at high temperatures, restricting their use in semiconductor manufacturing processes like CVD and ALD.
Innovation Solution
A variable orifice valve design comprising a first and second fixed plate, a movable plate, sealing elements, and an actuator ring, allowing for wide conductance range and high-temperature operation, with features like bellows for flexibility and motor-driven actuation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional variable orifice valves are used, then the valve structure is simple, but the conductance range is limited and high-temperature operation is not possible
Solution Approach 1:
The valve body is divided into multiple plates (first fixed plate, second fixed plate, movable plate) with distinct functions. Each plate can be independently designed and manufactured, allowing optimization for specific functions while maintaining overall system performance.
Solution Approach 2:
The needle is nested within the opening of the first fixed plate, and the movable plate is positioned between the two fixed plates. This nested arrangement allows compact design while maintaining the required conductance control range.
2Adaptability or versatility
If the conductance range is expanded and high-temperature operation is enabled, then the valve becomes more versatile, but the valve structure becomes more complex
Solution Approach 1:
The movable plate serves multiple functions: it controls the needle position for conductance adjustment, provides sealing surfaces against both fixed plates, and supports the bellows assembly. This multi-functionality reduces the need for separate components.
Solution Approach 2:
Bellows are used as flexible sealing elements that can accommodate thermal expansion and movement while maintaining seals. The bellows provide both sealing function and flexibility for the movable plate to move during conductance adjustment.
3Reliability
If sealing elements are added to reduce leakage, then system sealing is improved, but device complexity increases
Solution Approach 1:
The sealing function is merged into the bellows elements, which combine flexible membrane sealing with mechanical movement capability. This eliminates the need for separate sealing components and moving parts.
Solution Approach 2:
The bellows sealing elements automatically accommodate thermal expansion and movement through their flexible nature, providing self-adjusting sealing without additional actuators or complex control mechanisms.
Data Source
AI summary
Variable orifice valves comprising a first fixed plate, a second fixed plate and a movable plate between are described. The movable plate is connected to the first fixed plate and the second fixed plate by sealing elements. The movable plate is moved closer to or further from the first fixed plate by rotation of an actuator ring that rotates at least two rotary elements connected to the movable plate. A needle on the movable plate engages an opening in the valve to seal or open the valve to allow fluid flow. Methods of controlling flow of fluid through the variable orifice valve are also described.