Electrode Array with Variable Pitch for Micro Assembly
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Solution Overview
Problem
The challenge in micro assembly of semiconductor devices lies in the high computational data requirements for electrode arrays, increased manufacturing costs due to the need for expensive processes, and the limitation of using low voltages in high-density electrode arrays, which becomes impractical for larger scales.
Innovation Solution
The implementation of an electrode array with a first zone of low resolution and a second zone of high resolution, where electrodes in the low resolution zone are spaced farther apart for coarse positioning and orientation, and closer together in the high resolution zone for precise positioning, reducing computational data needs and allowing for less expensive manufacturing and higher voltage usage without failure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If high-density electrode arrays are used for precise positioning, then positioning precision is improved, but computational data requirements increase
Solution Approach 1:
The electrode array is divided into multiple zones with different electrode densities. A first zone contains electrodes spaced at a first pitch, while a second zone contains electrodes spaced at a second pitch that is smaller than the first pitch. This segmentation allows different regions to serve different positioning precision requirements, reducing the overall computational data needed while maintaining high precision where necessary.
Solution Approach 2:
Different zones of the electrode array are assigned different electrode pitches according to the specific positioning precision requirements of each zone. The first zone uses a larger pitch for areas requiring coarse positioning, while the second zone uses a smaller pitch for areas requiring fine positioning. This local quality approach optimizes the balance between positioning precision and computational complexity.
2Manufacturing precision
If high-density electrode arrays are used, then positioning precision is improved, but manufacturing costs increase
Solution Approach 1:
The electrode array is segmented into zones with different density requirements. Zones requiring high precision use smaller electrode pitches, while other zones use larger pitches that are easier and less costly to manufacture. This reduces the need for expensive high-precision manufacturing processes across the entire array.
Solution Approach 2:
The manufacturing approach is optimized locally for each zone. Areas requiring high precision are manufactured with smaller pitch using appropriate processes, while other areas use larger pitch that can be manufactured more economically. This local quality strategy reduces overall manufacturing costs while maintaining necessary precision.
3Manufacturing precision
If high-density electrode arrays are used, then positioning precision is improved, but voltage limitations increase
Solution Approach 1:
The electrode array is divided into zones with different electrode pitches. Zones with smaller pitch (higher density) are limited to lower voltages to prevent breakdown, while zones with larger pitch can tolerate higher voltages. This segmentation allows the system to operate reliably across different voltage ranges in different regions.
Solution Approach 2:
Voltage operating parameters are optimized locally for each zone based on electrode pitch. Zones with smaller pitch use lower voltages appropriate for their density, while zones with larger pitch can utilize higher voltages for greater force. This local optimization maintains reliability while enabling precise positioning where needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach decreases the computational data required for electrode array operation, lowers manufacturing costs, and enables the use of higher voltages without electrode array failure, making it more practical for larger scales and improving the efficiency of micro assembly processes.
Implementation Method 1
Xerographic micro assembly is a method of fabricating devices using xerographic like, electrostatic force based directed assembly techniques to assemble functional micro objects to complex device structure
Implementation Method 2
An electric field pattern may be applied to the electrode array that attracts the mobile micro objects
Data Source
AI summary
An electrode array including a substrate. The electrode array includes a first plurality of electrodes disposed above a first zone of the substrate, wherein the first plurality of electrodes has a first range of spacing. The electrode array further includes a second plurality of electrodes disposed above a second zone of the substrate, wherein the second plurality of electrodes has a second range of spacing that is less than the first range of spacing.