Variable-Pitch Robot End Effectors Within Rectangular Mainframes

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing robot apparatuses struggle to maintain a constant pitch between extended and retracted positions within a rectangular mainframe, leading to operational limitations such as exceeding the sweep diameter specifications and potential collisions with the mainframe walls, especially when handling dual substrates.

Innovation Solution

The robot apparatus is designed with a motion control mechanism that includes a combination of motors and cam pulleys, allowing the end effectors to be folded inward during retraction, enabling rotation within the sweep diameter defined by the mainframe's width and maintaining a consistent distance between end effectors, even when handling dual substrates.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the robot apparatus extends end effectors into processing chambers separated by a pitch, then substrate processing capability is improved, but the sweep diameter exceeds the rectangular mainframe specifications

Engineering Contradiction:
Improvesubstrate processing capabilityVSAvoidsweep diameter
Core Design Contradiction:
Adaptability or versatilityVSLength of moving object

Solution Approach 1:

The robot apparatus transitions from a conventional circular mainframe to a rectangular mainframe configuration, utilizing the additional dimensional space provided by the rectangular geometry. This allows the end effectors to access chambers separated by pitch distances that would exceed the sweep diameter constraints of a circular mainframe, while the rectangular boundaries provide sufficient clearance for the extended reach.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If the robot apparatus maintains constant pitch between end effectors during retraction, then operational precision is improved, but the end effectors collide with mainframe walls

Engineering Contradiction:
Improvepitch maintenance precisionVSAvoidcollision with mainframe walls
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The robot apparatus employs dynamic pitch adjustment during the retraction sequence. Rather than maintaining a constant pitch throughout the entire motion, the system varies the pitch distance adaptively - maintaining constant pitch only during the critical phase when end effectors are retracted clear of the mainframe walls, and allowing pitch variation during extension and retraction phases where wall collision risk exists. This dynamic control enables precise pitch maintenance when needed while avoiding collisions through coordinated motion planning.

Inventive Principle:
Principle #15Dynamics

3Area of stationary object

If the robot apparatus uses a rectangular mainframe configuration, then space utilization is improved, but the complexity of maintaining pitch and avoiding collisions increases

Engineering Contradiction:
Improvemainframe space utilizationVSAvoidmotion control complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The robot apparatus incorporates feedback control mechanisms that continuously monitor the positions of the end effectors relative to the mainframe walls and adjust the pitch maintenance accordingly. Sensors detect the spatial coordinates and operational status of each effector, and the control system processes this information to dynamically adjust motor commands, ensuring that pitch is maintained only when safe and coordinating movements to prevent wall collisions. This feedback loop manages the increased complexity by providing real-time adaptive control.

Inventive Principle:
Principle #23Feedback

Data Source

PatentUS20240071802A1Operations of robot apparatuses within rectangular mainframes
Publication Date: 2024.02.29 APPLIED MATERIALS INC
  • US20240071802A1 patent drawing
  • US20240071802A1 patent drawing
  • US20240071802A1 patent drawing

AI summary

A robot apparatus with variable end effector pitch is provided suitable for accommodating varying pitches, e.g., between two adjacent processing chambers or between two adjacent load lock chambers. The robot apparatus may operate in dual substrate handling mode, single substrate handling mode, or a combination thereof. The robot apparatus may also be an off-axis robot. A variety of robot apparatuses according to various embodiments, electronic device processing systems including such robot apparatuses, and methods of use thereof are described.