Variable-Pitch Robot End Effectors Within Rectangular Mainframes
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing robot apparatuses struggle to maintain a constant pitch between extended and retracted positions within a rectangular mainframe, leading to operational limitations such as exceeding the sweep diameter specifications and potential collisions with the mainframe walls, especially when handling dual substrates.
Innovation Solution
The robot apparatus is designed with a motion control mechanism that includes a combination of motors and cam pulleys, allowing the end effectors to be folded inward during retraction, enabling rotation within the sweep diameter defined by the mainframe's width and maintaining a consistent distance between end effectors, even when handling dual substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the robot apparatus extends end effectors into processing chambers separated by a pitch, then substrate processing capability is improved, but the sweep diameter exceeds the rectangular mainframe specifications
Solution Approach 1:
The robot apparatus transitions from a conventional circular mainframe to a rectangular mainframe configuration, utilizing the additional dimensional space provided by the rectangular geometry. This allows the end effectors to access chambers separated by pitch distances that would exceed the sweep diameter constraints of a circular mainframe, while the rectangular boundaries provide sufficient clearance for the extended reach.
2Manufacturing precision
If the robot apparatus maintains constant pitch between end effectors during retraction, then operational precision is improved, but the end effectors collide with mainframe walls
Solution Approach 1:
The robot apparatus employs dynamic pitch adjustment during the retraction sequence. Rather than maintaining a constant pitch throughout the entire motion, the system varies the pitch distance adaptively - maintaining constant pitch only during the critical phase when end effectors are retracted clear of the mainframe walls, and allowing pitch variation during extension and retraction phases where wall collision risk exists. This dynamic control enables precise pitch maintenance when needed while avoiding collisions through coordinated motion planning.
3Area of stationary object
If the robot apparatus uses a rectangular mainframe configuration, then space utilization is improved, but the complexity of maintaining pitch and avoiding collisions increases
Solution Approach 1:
The robot apparatus incorporates feedback control mechanisms that continuously monitor the positions of the end effectors relative to the mainframe walls and adjust the pitch maintenance accordingly. Sensors detect the spatial coordinates and operational status of each effector, and the control system processes this information to dynamically adjust motor commands, ensuring that pitch is maintained only when safe and coordinating movements to prevent wall collisions. This feedback loop manages the increased complexity by providing real-time adaptive control.
Data Source
AI summary
A robot apparatus with variable end effector pitch is provided suitable for accommodating varying pitches, e.g., between two adjacent processing chambers or between two adjacent load lock chambers. The robot apparatus may operate in dual substrate handling mode, single substrate handling mode, or a combination thereof. The robot apparatus may also be an off-axis robot. A variety of robot apparatuses according to various embodiments, electronic device processing systems including such robot apparatuses, and methods of use thereof are described.


