Variable Rate Fluid Manifold for Substrate Cleaning
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Solution Overview
Problem
Existing substrate cleaning systems are wasteful, environmentally hazardous, and inefficient due to excess fluid usage, which increases costs and contaminates equipment, especially at higher rotation speeds where more fluid is needed to maintain the cleaning process effectively.
Innovation Solution
A fluid manifold that delivers fluid directly into the gap between a substrate and an acoustic transducer at a variable rate using a plurality of apertures with different sizes and spacings, ensuring efficient fluid use and minimizing excess fluid on the surface, allowing for higher rotational speeds while maintaining effective cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If higher rotation speeds are used during substrate processing, then substrate cleaning effectiveness is improved, but fluid consumption increases
Solution Approach 1:
The fluid delivery system is segmented into multiple independently controllable outlets positioned at different locations along the substrate processing path. Each outlet can be activated or deactivated based on the substrate's rotational position and cleaning requirements, allowing fluid to be applied only where and when needed rather than continuously across the entire substrate surface.
Solution Approach 2:
The fluid delivery system dynamically adjusts the activation and flow rate of individual outlets based on real-time substrate position and processing requirements. This dynamic control allows the system to optimize fluid consumption at each rotational position while maintaining effective cleaning, rather than using a static high-flow approach throughout the entire cycle.
2Reliability
If excess fluid is dispensed onto the substrate surface, then the gap between substrate and transducer is maintained, but environmental and safety problems increase
Solution Approach 1:
The harmful excess fluid is extracted from the system by precisely controlling fluid delivery to match only the minimum amount needed to maintain the acoustic gap. The segmented outlet system allows fluid to be applied locally and immediately carried away by substrate rotation, preventing accumulation and subsequent environmental hazards from evaporation or atomization.
Solution Approach 2:
Fluid is applied with local quality control through individually controllable outlets that deliver fluid only to specific locations where the gap needs maintenance. This localized application prevents excess fluid from spreading across the substrate surface, thereby eliminating the environmental and safety hazards associated with widespread fluid presence.
3Productivity
If fluid is dispensed onto the substrate surface, then cleaning is achieved, but fluid waste increases operational costs
Solution Approach 1:
The cleaning process is segmented into discrete fluid application zones corresponding to different substrate positions. Only the outlets directly over the substrate surface are activated during cleaning, while outlets at other positions remain inactive. This segmentation eliminates fluid waste by ensuring fluid is applied only where cleaning is actually occurring.
Solution Approach 2:
The system applies exactly the partial amount of fluid needed for effective cleaning without excessive dispensing. By controlling each outlet independently and activating only when and where substrate cleaning is occurring, the system avoids the excessive fluid application that characterizes conventional systems, thereby reducing waste and operational costs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces fluid waste, prevents property changes in the fluid, allows for higher rotational speeds, and effectively cleans both the substrate surface and its backside, minimizing environmental impact and operational costs.
Implementation Method 1
The fluid in the gap is energized by acoustic energy from the transducer 34. The combined effect of the fluid 18 and the acoustic energy is to process or clean the surface, such as by the removal of small particles from the surface.
Implementation Method 2
the manifold includes a plurality of apertures positioned along the length of the manifold for dispensing the fluid into the gap. To achieve the variable rate of fluid delivery, the plurality of apertures may dispense the fluid at different rates, or the plurality of apertures may have different sizes, or there may be different distances between adjacent apertures.
Data Source
AI summary
A fluid manifold comprised of a manifold adapted to deliver fluid directly into a gap formed between a surface of a substrate and an acoustic transducer. The fluid is delivered into the gap at a variable rate along a length of the manifold. Preferably, the manifold includes a plurality of apertures positioned along the length of the manifold for dispensing the fluid into the gap at the variable rate.