Variable Resolution Spectrometer Interleaving Deconvolution
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Solution Overview
Problem
Conventional film measurement systems face limitations in spectral resolution due to optical point spread functions (PSFs) and sensor pixel sizes, particularly when measuring thick film stacks, leading to attenuated signals and inability to correctly reconstruct ideal spectra, especially for shorter wavelengths like ultraviolet.
Innovation Solution
A variable resolution spectrometer is introduced, comprising an optical system with a diffraction grating, steering mirror, and a high-precision motion stage or actuator, which varies the incidence of rays on a sensor array with multiple pixel columns, allowing for interleaving and deconvolution of the point spread function to recover a digitized spectrum.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional film measurement systems use standard sensor pixel sizes and optical systems, then the system structure is simple and easy to manufacture, but the spectral resolution is limited and cannot accurately measure thick film stacks
Solution Approach 1:
The sensor array is divided into multiple pixel columns that can be independently controlled to perform sequential scanning measurements. Each pixel column captures spectral data at different spatial positions, and the data from multiple columns are interleaved to reconstruct a high-resolution spectrum, effectively segmenting the measurement process to overcome pixel size limitations
Solution Approach 2:
The optical system incorporates a movable stage or actuator that dynamically adjusts the position of the sensor array or diffraction grating during measurement. This dynamic positioning enables sequential scanning across different spatial locations, transforming a static system into a dynamic one that can achieve higher spectral resolution through time-multiplexed measurements
2Reliability
If the sensor pixel size is increased to improve signal detection, then the detection capability is enhanced, but the spectral resolution deteriorates due to pixel size limitations
Solution Approach 1:
The system transitions from a two-dimensional spectral measurement problem to a three-dimensional solution by adding the spatial scanning dimension. Multiple pixel columns scan across different spatial positions, creating a space-spectral data cube that is then processed through interleaving to recover high-resolution spectral information, effectively using an additional dimension to overcome pixel size constraints
3Measurement precision
If conventional optical systems are used without deconvolution, then the measurement process is simple and fast, but the spectral reconstruction is inaccurate especially for shorter wavelengths
Solution Approach 1:
A point spread function (PSF) model is introduced as an intermediary to characterize and correct the optical system's blurring effects. The PSF serves as a transfer function that describes how the system transforms the ideal spectrum, and deconvolution using this PSF model acts as a mathematical intermediary to reverse the blurring and recover the true spectral distribution, particularly improving shorter wavelength reconstruction
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the ability to accurately measure thick film stacks by improving spectral resolution and reconstructing underlying film stack properties, overcoming the limitations of conventional techniques and increasing the effectiveness of inspection tools.
Implementation Method 1
The optical system may include a diffraction grating
Data Source
AI summary
Systems, methods, apparatuses, and articles of manufacture are provided for recovering a digitized spectrum and may comprise: an optical system configured to transform rays, the optical system including a diffraction grating, a steering mirror, a stage, and an actuator configured to move one of the stage, diffraction grating, or steering mirror according to a movement regime to vary an incidence of the rays on the stage; a sensor array disposed on the stage configured to receive the rays incident from the optical system at a plurality of measurement locations to obtain a plurality of ray spectra; and a processor electrically connected to the sensor array configured to receive the ray spectra, interleave the ray spectra to yield an interleaved spectrum, and deconvolve a point spread function corresponding to the optical system from the interleaved spectrum to yield a recovered digitized spectrum.