Variable Shape Mirror Bidirectional Displacement

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Solution Overview

Problem

Existing variable shape mirrors with comb electrode structures can only displace in one direction perpendicular to the reflective surface, limiting their application in adaptive optics systems and requiring larger displacements and drive voltages, while structures enabling two-direction displacement are complex and difficult to manufacture.

Innovation Solution

A variable shape mirror design incorporating two actuators with separate comb electrode pairs, allowing displacement in opposite directions perpendicular to the reflective surface, simplifying the structure and reducing manufacturing complexity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a single comb electrode structure is used for displacement, then the structure is simple, but displacement can only occur in one direction perpendicular to the reflective surface

Engineering Contradiction:
Improvedisplacement direction capabilityVSAvoidactuator structure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines two separate comb electrode structures (first and second actuators) into a single integrated actuator assembly that shares common components such as the movable comb electrode, fixed comb electrode, and elastic body. This merging approach enables bidirectional displacement while avoiding the need for completely separate actuator systems, thus improving adaptability without proportionally increasing device complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The actuator is segmented into functionally distinct first and second comb electrode pairs, where each pair is responsible for displacement in a specific direction. The first actuator handles displacement in one direction perpendicular to the reflective surface, while the second actuator handles displacement in the opposite direction. This segmentation allows independent control of displacement directions while maintaining structural integration.

Inventive Principle:
Principle #1Segmentation

2Adaptability or versatility

If comb electrodes are electrically divided in Z direction to achieve two-direction displacement, then displacement in two directions is possible, but the structure becomes complex and difficult to manufacture

Engineering Contradiction:
Improvetwo-direction displacement capabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

Instead of dividing the comb electrodes electrically in the Z direction (which creates manufacturing complexity), the patent inverts the approach by using spatially separated first and second actuator pairs along the Y direction. Each actuator pair remains electrically simple and structurally uniform, but their combined action achieves two-direction displacement. This inversion of the design strategy maintains ease of manufacture while achieving the desired functionality.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent transitions from Z-direction electrical division to Y-direction spatial arrangement of actuator pairs. By positioning the first and second actuators at different locations along the Y axis and controlling their respective displacements, the system achieves bidirectional control without complicating the electrical or structural design of individual comb electrode pairs. This dimensional shift simplifies manufacturing while maintaining functional capability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Stability of the object's composition

If spring stiffness is increased to reduce movable amount, then structural stability improves, but drive voltage becomes larger

Engineering Contradiction:
Improvestructural stabilityVSAvoiddrive voltage
Core Design Contradiction:
Stability of the object's compositionVSUse of energy by moving object

Solution Approach 1:

The patent combines the displacement functions of two actuators working in opposition, where the first actuator displaces in one direction and the second actuator displaces in the opposite direction. This combined configuration effectively doubles the available displacement range compared to a single actuator system, allowing the use of softer springs with lower stiffness. Consequently, the drive voltage required to achieve the same mirror displacement is reduced while maintaining structural stability through the balanced opposing forces.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables displacement in two directions perpendicular to the reflective surface with reduced drive voltage requirements and lower stiffness, improving the mirror's ability to correct optical aberrations efficiently.

Implementation Method 1

an actuator including a connecting portion to be connected to the mirror base, a first actuator, and a second actuator... a first electrode pair of a comb electrode structure for displacing the connecting portion in a first direction perpendicular to the reflective surface, and a second electrode pair of a comb electrode structure for displacing the connecting portion in a second direction opposite to the first direction

Methodology Applied
Scientific EffectElectrostatic attractive force: Electrostatics

Data Source

PatentUS10274723B2Variable shape mirror, ophthalmological apparatus, adaptive optical system and method of manufacturing variable shape mirror
Publication Date: 2019.04.30 CANON KK
  • US10274723B2 patent drawing
  • US10274723B2 patent drawing
  • US10274723B2 patent drawing

AI summary

Provided is a technology that realizes a variable shape mirror using an actuator having a comb electrode structure, which can be relatively easily manufactured and displaced in two (.+-.) directions perpendicular to a mirror reference plane. A variable shape mirror (100) includes: a mirror base (111) including a reflective surface (110); and an actuator (101) including a first actuator and a second actuator. Each of the plurality of actuators is connected to the mirror base via a connecting portion (121). The first actuator has a first electrode pair (104, 105) of a comb electrode structure for displacing the connecting portion in a first direction perpendicular to the reflective surface. The second actuator has a second electrode pair (108, 109) of a comb electrode structure for displacing the connecting portion in a second direction opposite to the first direction, the second electrode pair being separately formed from the first electrode pair.