Variable-Size Sample Tilt Zones for High-NA Imaging Focus
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Solution Overview
Problem
Increasing the numerical aperture (NA) of optical imaging systems improves resolution but reduces the depth of field (DoF), making it difficult to maintain focus as the sample is translated, especially when local tilts or twists cause parts of the image to be out of focus, leading to poor data quality and loss.
Innovation Solution
Implementing intelligent sample tilt or tip adjustment using zones of variable size, where each zone is assigned a detilt or detip value based on surface profile data to maintain focus during imaging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the numerical aperture (NA) of the optical imaging system is increased to improve resolution, then imaging resolution is improved, but the depth of field (DoF) is reduced
Solution Approach 1:
The sample is divided into multiple zones based on surface profile data, with each zone having its own detilt value. This segmentation allows different regions of the sample to be focused independently, compensating for the reduced depth of field caused by high NA imaging.
Solution Approach 2:
Different zones of the sample are assigned different detilt values based on their local topography. This local adjustment ensures that each region is optimally focused according to its specific surface characteristics, rather than applying a uniform focus adjustment across the entire sample.
2Reliability
If global detilt adjustment is applied to the entire sample, then the overall focus is improved, but local tip or tilt variations within the sample still cause depth of field excursions
Solution Approach 1:
The sample is divided into multiple zones based on surface profile data, with each zone having its own detilt value. This segmentation allows different regions of the sample to be focused independently, compensating for the reduced depth of field caused by high NA imaging.
Solution Approach 2:
Different zones of the sample are assigned different detilt values based on their local topography. This local adjustment ensures that each region is optimally focused according to its specific surface characteristics, rather than applying a uniform focus adjustment across the entire sample.
3Measurement precision
If the depth of field is reduced by increasing NA, then resolution is improved, but local tip or tilt creates large depth of field excursions causing out of focus regions
Solution Approach 1:
The sample is divided into multiple zones based on surface profile data, with each zone having its own detilt value. This segmentation allows different regions of the sample to be focused independently, compensating for the reduced depth of field caused by high NA imaging.
Solution Approach 2:
Different zones of the sample are assigned different detilt values based on their local topography. This local adjustment ensures that each region is optimally focused according to its specific surface characteristics, rather than applying a uniform focus adjustment across the entire sample.
Data Source
AI summary
Some implementations of the disclosure relate to a method including: obtaining surface profile data of a swath of a sample, the swath divided into multiple tiles, and the surface profile data including surface profile data for each tile; calculating, based at least on a threshold residual and the surface profile data of the swath, one or more zones of the swath that include the multiple tiles, each zone including a respective one or more of the tiles that are adjacent; and associating, based on the surface profile data associated with the one or more tiles of each zone, a detilt value or detip value with each zone, the detilt value or detip value indicating an amount to adjust, before capturing one or more images of the zone, a relative tilt or tip between the sample and an image sensor of an imaging system capturing the one or more images.