Variable Wavelength Interference Filter Against Charge Accumulation
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Solution Overview
Problem
Existing variable wavelength interference filters face issues with electric charge accumulation due to the use of electrically conductive high-refractive-index materials, leading to operational hindrances, and the diaphragm's structural weakness results in low impact resistance and reliability.
Innovation Solution
A variable wavelength interference filter design featuring a diaphragm with an annular groove and symmetrical electrically continuous multilayer film structure, where the multilayer film covers the diaphragm and includes symmetrical wiring patterns to establish electrical continuity, preventing charge accumulation and enhancing diaphragm strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an electrically conductive high-refractive-index material is used in the multilayer film, then light reflection performance is improved, but electric charge accumulation occurs causing operational hindrances
Solution Approach 1:
The patent divides the multilayer film into multiple alternating layers of high-refractive-index and low-refractive-index materials. This segmentation allows the high-refractive-index layers to provide optical reflection functionality while the low-refractive-index layers act as electrical insulation barriers, preventing charge accumulation and enabling reliable electrostatic actuator operation.
2Manufacturing precision
If the diaphragm is made thin to enable precise wavelength selection, then optical precision is improved, but structural strength and impact resistance deteriorate
Solution Approach 1:
The patent employs a composite structure where the thin diaphragm is supported by the multilayer film system. The alternating layers of high and low refractive index materials create a composite structure that provides both the necessary optical precision for wavelength selection and enhanced mechanical strength through the distributed layer architecture, preventing diaphragm deformation while maintaining thinness.
3Reliability
If the multilayer film covers the diaphragm to prevent charge accumulation, then electrical continuity is improved, but stress concentration may occur affecting diaphragm reliability
Solution Approach 1:
The patent applies the multilayer film structure with specific local characteristics - the alternating high and low refractive index layers are positioned to provide electrical continuity and stress distribution in specific regions. The low-refractive-index layers are strategically placed to reduce stress concentration at the diaphragm interface while maintaining overall electrical continuity through the high-refractive-index conductive layers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design ensures high impact resistance and improved reliability by preventing electric charge accumulation and stress concentration, allowing for reliable operation of the electrostatic actuator.
Implementation Method 1
changes the distance between the pair of reflection mirrors to select light having a predetermined wavelength from light under measurement
Implementation Method 2
The multilayer film has an electrically continuous structure that establishes electrical continuity between the multiple layers
Implementation Method 3
variable wavelength interference filter
Data Source
AI summary
A variable wavelength interference filter includes a first substrate including a first reflection film; and a second substrate including a second reflection film facing the first reflection film. The second substrate includes a diaphragm including an annular groove surrounding a movable section at which the second reflection film is disposed, and an annular second electrode surrounding the second reflection film. The first substrate includes a first electrode facing the second electrode. A voltage is applied to a space between the first electrode and the second electrode to change a gap between the first reflection film and the second reflection film. A multilayer film that forms the second reflection film is formed so as to cover the diaphragm. The multilayer film has an electrically continuous structure that establishes electrical continuity between the multiple layers. The electrically continuous structure includes an electrically continuous portion having a symmetrical arrangement with respect to a center of the second reflection film.