Variable-Width Mask Assembly for Display Deposition
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Solution Overview
Problem
The increasing demand for flexible and durable display structures in mobile electronic devices poses challenges in manufacturing, particularly in creating a mask assembly that can efficiently support the deposition of materials on display substrates while maintaining durability.
Innovation Solution
The proposed solution involves a mask assembly with a first mask layer made of silicon material and a second mask layer made of inorganic material. The first mask layer includes a first portion and a second portion with specific openings, and the second mask layer has openings above the second portion openings. This configuration allows for efficient material deposition and reduces the shadow effect, while also enhancing the durability of the mask assembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional mask assembly is used with uniform opening widths, then the manufacturing process is simple, but shadow effects occur during material deposition and manufacturing precision deteriorates
Solution Approach 1:
The mask opening transitions from uniform width to variable width where the lower opening portion is narrower than the upper opening portion. This local differentiation in opening geometry allows different regions of the mask to serve different functions: the narrower lower portion prevents shadow effects by directing material flow, while the wider upper portion maintains structural integrity and simplifies manufacturing.
2Reliability
If the mask assembly structure is simplified, then manufacturing is easier, but durability and resistance to transformation deteriorate
Solution Approach 1:
The mask assembly employs a composite structure with a lower mask layer and an upper mask layer positioned above it. The lower mask layer includes the variable-width opening while the upper mask layer provides additional structural support. This composite configuration enhances the overall durability and resistance to transformation of the mask assembly while maintaining manufacturability through a systematic two-layer design.
3Productivity
If conventional mask openings are used, then manufacturing is straightforward, but shadow effects reduce deposition efficiency
Solution Approach 1:
The patent applies parameter changes by varying the width of the mask opening along its height, specifically making the lower opening portion narrower than the upper opening portion. This geometric parameter modification optimizes material deposition efficiency by eliminating shadow effects, while the systematic approach to creating variable-width openings maintains ease of manufacture through controlled fabrication processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The described mask assembly simplifies the manufacturing process, reduces material deposition shadows, and improves the durability of the mask, thereby supporting the efficient production of flexible and high-quality display structures for mobile electronic devices.
Implementation Method 1
a deposition source disposed inside the chamber to face the mask assembly and configured to supply a deposition material such that the deposition material passes through the mask assembly and is deposited on the display substrate
Data Source
AI summary
An apparatus for manufacturing a display apparatus includes a mask assembly, wherein the mask assembly includes a first mask layer including a silicon material, a first portion, and a second portion on the first portion, wherein a first portion opening is disposed in the first portion and a plurality of second portion openings are disposed in the second portion above the first portion opening, and a second mask layer disposed on the first mask layer. The second mask layer includes an inorganic material, wherein the inorganic material has a plurality of second mask openings above the plurality of second portion openings, and wherein, in a cross-sectional view, a width of each of the plurality of second portion openings increases with distance from the second mask layer.