Two-axis Variable Width Mass Resolving Aperture with Fast Shutter
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Ion implantation systems face challenges in selectively controlling the width of the mass resolving aperture and efficiently blocking the ion beam, often requiring separate components that complicate the process and reduce precision.
Innovation Solution
A system that integrates a mass analyzer for both mass analysis and angle correction, utilizing a resolving aperture assembly with adjustable plates and actuators to vary the aperture width and position, allowing for precise control of the ion beam based on desired properties and conditions, including the use of servo motors and pneumatic cylinders for precise movement and shuttering.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If separate components are used for mass analysis and angle correction, then functional versatility is improved, but device complexity increases
Solution Approach 1:
The mass analyzer is designed to perform both mass analysis and angle correction functions simultaneously. The analyzer uses a magnetic field to deflect ions based on their mass-to-charge ratio while also correcting angular deviations of the ion beam, thereby eliminating the need for separate angle correction components and reducing overall device complexity.
Solution Approach 2:
The patent combines the mass analysis function and angle correction function into a single integrated mass analyzer component. By merging these two functions into one device, the system reduces the number of components required while maintaining both functionalities, thus resolving the contradiction between versatility and complexity.
2Device complexity
If a fixed aperture width is used, then device simplicity is improved, but manufacturing precision deteriorates
Solution Approach 1:
The resolving aperture assembly incorporates adjustable plates that can be moved to change the aperture width dynamically. This allows the system to achieve precise aperture width control for different manufacturing requirements while maintaining a relatively simple overall device structure. The adjustability provides precision without requiring multiple fixed aperture components.
3Stability of the object's composition
If slow shutter motion is used, then mechanical stability is improved, but productivity deteriorates
Solution Approach 1:
The shutter mechanism in the resolving aperture assembly uses pneumatic actuators to achieve fast opening and closing speeds. The pneumatic system provides rapid response while maintaining controlled motion, thereby improving productivity without sacrificing mechanical stability. This resolves the contradiction between slow shutter motion and fast response requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise control of the ion beam width and position, effectively reducing unwanted isotopes and improving ion beam profile measurement, while providing a fast-acting shutter mechanism to block the beam when necessary, enhancing the overall efficiency and accuracy of ion implantation.
Implementation Method 1
Mass analyzers typically employ a mass analysis magnet creating a dipole magnetic field to deflect various ions in an ion beam via magnetic deflection in an arcuate passageway that effectively separates ions of different charge-to-mass ratios
Implementation Method 2
Generally, an electrostatic or magnetic based scanner scans the ion beam in a fast direction
Implementation Method 3
Generally, an electrostatic or magnetic based scanner scans the ion beam in a fast direction
Data Source
AI summary
A resolving aperture assembly for an ion implantation system has a first plate and a second plate, where the first plate and second plate generally define a resolving aperture therebetween. A position of the first plate with respect to the second plate generally defines a width of the resolving aperture. One or more actuators are operably coupled to one or more of the first plate and second plate and are configured to selectively vary the position the first plate and second plate with respect to one another, thus selectively varying the width of the resolving aperture. A servo motor precisely varies the resolving aperture width and a pneumatic cylinder independently selectively closes the resolving aperture. A downstream position actuator varies a position of the resolving aperture along a path of the ion beam, and a controller controls the one or more actuators based on desired properties of the ion beam.