Sensor Detection Elements with Varied Heat Dissipation
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Solution Overview
Problem
Existing sensors using MEMS elements face challenges in accurately detecting multiple substances due to insufficient accuracy and prolonged measurement times when relying on a single detection element with a single heat dissipation characteristic, complicating control circuits.
Innovation Solution
The sensor employs multiple detection elements with varying heat dissipation characteristics, utilizing differences in area, length, width, thickness, and material of connect portions to enhance detection accuracy and reduce measurement time by solving simultaneous equations for substance concentration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single detection element with a single heat dissipation characteristic is used, then the device complexity is reduced, but the measurement precision and detection accuracy for multiple substances deteriorates
Solution Approach 1:
The detection system is segmented into multiple detection elements (first detection element and second detection element), each with different heat dissipation characteristics. This segmentation allows simultaneous detection of multiple substances with different thermal conductivities, resolving the contradiction between simple device structure and high measurement precision.
Solution Approach 2:
Each detection element is designed with specific local quality differences - the first detection element has a first heat dissipation characteristic while the second detection element has a second heat dissipation characteristic. These localized quality differences enable each element to be optimally suited for detecting specific substances, achieving high detection accuracy without requiring a complex unified system.
2Device complexity
If a single detection element is used, then the device structure is simplified, but the measurement time increases and productivity decreases
Solution Approach 1:
By segmenting the detection function across multiple parallel detection elements with different heat dissipation characteristics, the system can simultaneously process multiple substance types, dramatically reducing measurement time and increasing productivity while maintaining relatively simple individual element structures.
Solution Approach 2:
The multiple detection elements operate simultaneously and continuously, allowing the system to detect multiple substances in parallel without sequential measurement delays. This continuous parallel operation maintains simple device structure while significantly improving measurement speed and productivity.
3Measurement precision
If multiple detection elements with different heat dissipation characteristics are used, then the measurement precision for multiple substances is improved, but the device complexity increases
Solution Approach 1:
The patent applies local quality by giving each detection element specific, distinct heat dissipation characteristics tailored to detecting particular substances. This allows high measurement precision for multiple substances while keeping each individual element relatively simple, avoiding the need for a single complex detection system.
Solution Approach 2:
The detection elements differ in key parameters such as heat dissipation characteristics, area, and connect portion properties. By changing these parameters across multiple elements rather than creating a single complex element, the system achieves high multi-substance detection accuracy with manageable device complexity.
4Measurement precision
If multiple detection elements with varying dimensions and materials are used, then the detection accuracy and productivity are improved, but the manufacturing precision requirements increase
Solution Approach 1:
The patent deliberately changes key parameters (area, connect portion length, connect portion width, connect portion thickness, material) across multiple detection elements to create distinct heat dissipation characteristics. These parameter variations are designed to be achievable within standard manufacturing tolerances, achieving high detection accuracy without excessively stringent manufacturing precision requirements.
Solution Approach 2:
Each detection element has locally optimized quality parameters that differ from others, allowing manufacturing focus on individual element specifications rather than ultra-precise control of a single complex element. This local quality approach achieves high detection precision with practical manufacturing precision levels.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for high-accuracy detection of multiple substances with reduced measurement time by leveraging the unique thermal properties of each detection element, improving overall sensor performance.
Implementation Method 1
a first gap is provided between the first base region and the first detection element... A second gap is provided between the second base region and the second detection element
Data Source
AI summary
According to one embodiment, a sensor includes a base, first and second detection units. The base includes first and second base regions. The first detection unit includes a first detection element including a first resistance member, a first conductive member, and a first insulating member. A part of the first insulating member is between the first resistance member and the first conductive member. A first gap is provided between the first base region and first detection element. The first detection element has a first area. The second detection unit includes a second detection element including a second resistance member, a second conductive member, and a second insulating member. A part of the second insulating member is between the second resistance member and the second conductive member. A second gap is provided between the second base region and second detection element. The second detection element has a second area.