Vertically-Coupled Surface-Etched Grating DFB Laser Design

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Solution Overview

Problem

The design and fabrication of distributed-feedback (DFB) lasers for photonic integrated circuits (PICs) face challenges in achieving high coupling efficiency while maintaining cost-effectiveness and simplicity, particularly due to limitations in surface etched grating designs that compromise optical mode confinement and are sensitive to fabrication imperfections.

Innovation Solution

A vertically-coupled surface etched grating DFB (VCSEG-DFB) laser design is introduced, featuring a mesa structure with periodic trenches etched from the top surface, providing vertical optical confinement and allowing for increased overlap between the optical mode and the grating without compromising mode confinement, thus enhancing coupling efficiency and reducing manufacturing variations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If surface etched grating is used to enhance coupling efficiency, then optical mode overlap with grating increases, but optical mode confinement is compromised

Engineering Contradiction:
Improvecoupling efficiencyVSAvoidoptical mode confinement
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent transitions from lateral coupling to vertical coupling by etching gratings perpendicular to the waveguide plane. This dimensional change allows the optical mode to maintain its lateral confinement while achieving enhanced overlap with the grating structure through the vertical evanescent field, thereby resolving the contradiction between coupling efficiency and mode confinement.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent introduces an intermediary layer (such as a low-index cladding or air gap) between the waveguide and the substrate. This intermediary structure enables the evanescent field to extend vertically and interact more effectively with the etched grating, enhancing coupling efficiency without disrupting the lateral confinement of the optical mode in the waveguide core.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If surface etched grating design is simplified for cost-effectiveness, then fabrication complexity reduces, but sensitivity to fabrication imperfections increases

Engineering Contradiction:
Improvefabrication simplicityVSAvoidsensitivity to fabrication imperfections
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent applies local quality by creating gratings with varying depths or profiles in different regions. By optimizing the grating structure locally (e.g., deeper etching in critical regions, shallower in less critical regions), the design achieves robustness against fabrication variations while maintaining overall simplicity and cost-effectiveness.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent employs parameter changes by adjusting grating depth, duty cycle, and period to optimize performance. By carefully selecting these parameters, the design becomes less sensitive to typical fabrication imperfections such as etch depth variations or linewidth deviations, thereby achieving both simplicity and robustness.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If vertical coupling is implemented to enhance overlap, then coupling efficiency improves, but fabrication complexity increases

Engineering Contradiction:
Improvecoupling efficiencyVSAvoidfabrication process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the grating fabrication step with the existing waveguide fabrication process. By using the same lithography and etching steps that define the waveguide structure to also create the vertical gratings, the design achieves enhanced coupling efficiency without significantly increasing overall fabrication complexity. The grating pattern is integrated into the standard manufacturing flow.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The VCSEG-DFB laser achieves improved coupling efficiency and reduced optical loss, while simplifying the fabrication process and making it compatible with multi-guide vertical integration platforms, thereby enhancing the performance and cost-effectiveness of DFB lasers for PICs.

Implementation Method 1

vertically-coupled surface etched grating DFB (VCSEG-DFB) laser design

Methodology Applied
Scientific EffectBragg diffraction: Bragg Diffraction

Implementation Method 2

An optical waveguide is formed by the SCH that naturally provides a vertical confinement to the optical field

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 3

interacts with the SEG at the top of the mesa, by the vertical tail of the mode penetrating the SEG and evanescent field coupling to the SEG

Methodology Applied
Scientific EffectEvanescent field coupling:

Data Source

PatentUS10693278B2Vertically-coupled surface-etched grating DFB laser
Publication Date: 2020.06.23 ELECTROPHOTONIC IC INC
  • US10693278B2 patent drawing
  • US10693278B2 patent drawing
  • US10693278B2 patent drawing

AI summary

A VCSEG-DFB laser, fully compatible with MGVI design and manufacturing methodologies, for single growth monolithic integration in multi-functional PICs is presented. It comprises a laser PIN structure, in mesa form, etched from upper emitter layer top surface through the active, presumably MQW, gain region, down to the top surface of the lower emitter. Lower electrical contacts sit adjacent the mesa disposed on the lower emitter layer with upper strip contacts disposed atop the upper emitter layer on the mesa top. An SEG is defined/etched from mesa top surface, between the upper strip contacts, through upper emitter layer down to or into the SCH layers. Vertical confinement is provided by the SCH structure and the lateral profile in the bottom portion of the mesa provides lateral confinement. The guided mode interacts with the SEG by the vertical tail penetrating the SEG and evanescent field coupling to the SEG.