VCSEL Array Driving and Cooling for High-DPI Laser Addressing

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Solution Overview

Problem

Current semiconductor laser technologies face challenges in achieving high power output at high resolution (above 300 dpi) while accommodating tight-pitch packing and overcoming thermal crosstalk issues, which are essential for applications like high-speed printing and facial recognition.

Innovation Solution

The development of a semiconductor laser array architecture with improved designs, geometries, and cooling mechanisms, including direct die attachment to a submount with integrated cooling channels, transfer of the VCSEL epi layer onto a metal host substrate, and the use of selfoc lens arrays, enables high power output with reduced size and complexity, allowing for tight-pitch packing and efficient thermal management.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If VCSELs are packed into tight-pitch arrays to achieve high resolution (above 300 dpi), then digital addressability and resolution are improved, but thermal crosstalk between adjacent lasers increases and device complexity increases

Engineering Contradiction:
Improvedigital addressability resolutionVSAvoidthermal crosstalk
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent divides the laser array into independently addressable VCSEL elements with individual control electronics, allowing selective activation of specific pixels. This segmentation enables high-resolution imaging by addressing individual lasers while managing thermal load through selective operation rather than continuous operation of all elements.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from scalar power control to spatially-resolved multiplexed control, adding the dimension of spatial addressing. By organizing VCSELs into arrays with row and column addressing schemes, the system achieves high resolution through spatial multiplexing rather than increasing individual laser power, thereby reducing thermal crosstalk.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Power

If VCSEL aperture size is increased to achieve high power output (50 mW), then light output power is improved, but device size increases and tight-pitch packing becomes difficult

Engineering Contradiction:
Improvelight output powerVSAvoiddevice size
Core Design Contradiction:
PowerVSArea of stationary object

Solution Approach 1:

The patent combines multiple VCSEL elements into array configurations where the collective output of multiple small-aperture lasers achieves the required power level. By merging the output of several 10-20 μm aperture VCSELs, the system attains 50 mW total power while maintaining small individual device footprints suitable for tight-pitch packing.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent designs VCSEL arrays that can operate in multiple modes: individual pixel addressing for high-resolution imaging, grouped activation for power scaling, and adaptive optimization based on application requirements. This multi-functionality allows the same hardware platform to achieve both high power output and compact packaging by adjusting the activation pattern rather than changing physical dimensions.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Power

If VCSEL aperture size is increased to achieve high power output, then light output power is improved, but linear pitch requirements increase making high-resolution packing impossible

Engineering Contradiction:
Improvelight output powerVSAvoidlinear pitch
Core Design Contradiction:
PowerVSLength of moving object

Solution Approach 1:

The patent segments the power generation function across multiple small-aperture VCSELs rather than relying on a single large-aperture laser. Each VCSEL in the array has a small aperture (10-20 μm) suitable for tight pitch, but collectively they deliver high power through parallel operation and constructive interference of their optical outputs.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent resolves the pitch-power contradiction by transitioning from single-dimensional (single laser aperture size) to multi-dimensional control (array of small apertures with spatial multiplexing). The linear pitch is reduced to 21.2 μm by using multiple small VCSELs arranged in arrays, while power is scaled by activating multiple elements simultaneously or sequentially, effectively decoupling pitch from power requirements.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

4Manufacturing precision

If large number of high power lasers are operated in small region to achieve high resolution, then digital addressability is improved, but thermal load density increases requiring sophisticated cooling

Engineering Contradiction:
Improvedigital addressability resolutionVSAvoidthermal load density
Core Design Contradiction:
Manufacturing precisionVSTemperature

Solution Approach 1:

The patent incorporates cooling channels and thermal management structures into the substrate and mounting architecture before VCSEL operation. By pre-establishing thermal pathways through the substrate and heat sink interfaces, the system can dissipate heat from densely packed VCSELs efficiently, enabling high-resolution arrays to operate at elevated resolutions without thermal degradation.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent introduces intermediate thermal management layers including thermally conductive substrates, heat spreaders, and integrated cooling channels that mediate between the VCSEL heat sources and the external environment. These intermediary structures distribute and conduct heat away from the dense VCSEL array, reducing thermal load density and enabling high-resolution operation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables high-resolution (up to 1200 dpi) digital addressability and efficient thermal management, allowing for the use of high power VCSEL arrays in applications such as printing, facial recognition, and lidar systems with reduced size and complexity, while maintaining high light output and resolving thermal issues.

Implementation Method 1

direct die attachment to a submount with an integrated cooling channel

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

integrated cooling channel

Methodology Applied
Scientific EffectConvection: Convection

Implementation Method 3

transfer of the VCSEL epi layer onto a metal host substrate

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS11984701B2System for electronically controlling and driving independently addressable semiconductor lasers
Publication Date: 2024.05.14 XEROX CORP
  • US11984701B2 patent drawing
  • US11984701B2 patent drawing
  • US11984701B2 patent drawing

AI summary

A computer adapted to convert images into raw data can provide the raw data to a control interface adapted to transmit the raw data with timing information to an electronic driver circuit. The electronic driver circuit can convert the raw data with the timing information provided by a control interface into regulated current signals provided to the semiconductor laser array at 300 dpi and higher. The semiconductor array can convert the current signals into light to illuminate an imaging member. The laser array can comprise vertical cavity surface emitting lasers providing imaging greater than 300 dpi. Each semiconductor laser can operate at 50 mW or greater.