VCSEL Array Emitter Structure for Uniform 3D Sensing Output
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Solution Overview
Problem
Traditional VCSEL arrays suffer from non-uniform intensity distribution due to temperature gradients, leading to compromised 3D sensing quality as central emitters experience higher temperatures and reduced output power.
Innovation Solution
The VCSEL array is designed with varying emitter structures, such as differing oxide aperture sizes and metal layer dimensions, to equalize output power across the array by minimizing series resistance and heat-related power decreases.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If all VCSEL emitters have the same structure and dimensions, then manufacturing is simplified and ease of manufacture is improved, but temperature distribution becomes non-uniform and intensity uniformity deteriorates
Solution Approach 1:
The patent applies local quality by making VCSEL emitters in the central region have larger dimensions (oxide aperture, contact metal, reflector regions) compared to edge emitters. This local differentiation compensates for the higher temperature in central regions, as larger emitters generate more light output. The structure transitions from uniform to non-uniform based on spatial position, optimizing intensity uniformity across the array while maintaining manufacturing feasibility through systematic dimension scaling.
2Power
If VCSEL emitters operate at high power, then productivity and output power are improved, but heat generation increases and temperature rises causing power decrease
Solution Approach 1:
The patent applies parameter changes by systematically varying the dimensions of VCSEL emitter components (oxide aperture, contact metal, reflector regions) based on their position in the array. Central emitters have larger parameters to compensate for temperature-induced power loss. This parameter optimization allows the array to operate at high power while maintaining intensity uniformity across all emitters despite temperature gradients.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances intensity uniformity by ensuring that central emitters maintain similar output power levels to edge emitters, improving the quality of 3D sensing applications.
Implementation Method 1
an oxide aperture formed proximate to the active region
Implementation Method 2
a first reflector region formed over the substrate, an active region formed over the first reflector region, a second reflector region formed over the active region
Data Source
AI summary
A VCSEL array includes VCSEL structures on a substrate. Each VCSEL structure includes a first reflector region over the substrate, an active region over the first reflector region, a second reflector region over the active region, and an oxide aperture proximate to the active region. An oxide aperture of a VCSEL structure that is in a central region of the VCSEL array is larger than an oxide aperture of a VCSEL structure that is in an edge region of the VCSEL array.