Dilute Nitride VCSEL Barrier Structure for High-Temperature Confinement

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Solution Overview

Problem

Dilute nitride materials used in VCSELs for long-wavelength lasing suffer from poor carrier confinement, leading to significant performance degradation as temperature increases.

Innovation Solution

Implementing a graded-index structure, increasing the quantum well barrier (QWB) band gap, and incorporating p-doped regions in the QWB layers to enhance carrier confinement, injection, and capture efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If dilute nitride materials are used in VCSELs for long-wavelength lasing, then lasing at long wavelength (1200-1600 nm) is enabled, but carrier confinement is poor leading to performance degradation at higher temperatures

Engineering Contradiction:
Improveoperating temperature rangeVSAvoidperformance stability
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The patent applies local quality by creating a graded-index structure where the refractive index varies spatially across the barrier layer, and by introducing p-doped regions specifically in the QWB layers. These localized structural modifications enhance carrier confinement precisely where needed at the quantum well barriers, improving performance stability at elevated temperatures without affecting the overall long-wavelength lasing capability

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent employs composite materials by combining dilute nitride materials (InGaAsN or InGaAsNSb) with p-doped regions and graded-index structures. This composite approach creates a multi-functional barrier layer that maintains the long-wavelength emission properties of dilute nitride while adding carrier confinement enhancement through the p-doped regions and refractive index gradient

Inventive Principle:
Principle #40Composite materials

2Reliability

If conventional quantum well structure is used, then device structure is simple, but carrier confinement is insufficient leading to poor performance at higher temperatures

Engineering Contradiction:
Improvecarrier confinementVSAvoidquantum well barrier structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The graded-index structure and p-doped regions are implemented locally within the QWB layers rather than throughout the entire device. This targeted approach enhances carrier confinement at the critical quantum well interfaces while minimizing additional device complexity and maintaining manufacturing feasibility

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the refractive index parameter spatially through the graded-index structure and modifies the doping parameter by introducing p-doped regions. These parameter modifications enhance carrier confinement effectiveness without requiring fundamental redesign of the VCSEL architecture

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Improves VCSEL performance over temperature by maintaining output power and efficiency at higher operating temperatures.

Implementation Method 1

a barrier layer between the active region and the cladding layer, wherein the barrier layer comprises a graded-index structure

Methodology Applied
Scientific EffectGraded-index structure:

Implementation Method 2

one or more QWB of the one or more QWB layers includes a p-doped region

Methodology Applied
Scientific Effectp-doping: Dopants

Data Source

PatentUS12413048B2Dilute nitride long-wavelength emitter with improved performance over temperature
Publication Date: 2025.09.09 WELLS FARGO BANK NA
  • US12413048B2 patent drawing
  • US12413048B2 patent drawing
  • US12413048B2 patent drawing

AI summary

In some implementations, a method may include forming a quantum well (QW) layer using an epitaxial growth process, where the epitaxial growth process is performed according to a first growth mode to form the QW layer. The method may include forming a quantum well barrier (QWB) layer using the epitaxial growth process, where the epitaxial growth process is performed according to a second growth mode to form the QWB layer. In some implementations, a nitrogen flux used in the first growth mode is different from a nitrogen flux used in the second growth mode. In some implementations, a gallium flux used in the first growth mode is different from a gallium flux used in the second growth mode.