VCSEL Electrode Layout for Higher Array Integration

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Solution Overview

Problem

Surface emitting lasers face challenges in improving the degree of integration of their elements, which affects their performance and efficiency.

Innovation Solution

The design includes a substrate with multiple surface emitting laser elements, each with a first and second reflecting mirror, an active layer, and electrodes connected to form light emitting units, allowing for higher integration density by optimizing the arrangement and connection of p-side and n-side mesa post regions and electrodes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a mesa portion is provided in a surface emitting laser element with p-side and n-side contact electrodes, then the electrical connection is improved, but the degree of integration of surface emitting laser elements deteriorates

Engineering Contradiction:
Improveelectrical connectionVSAvoiddegree of integration
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent moves the first contact region from the upper surface (top dimension) to the lower surface (bottom dimension) of the substrate. This dimensional transition allows the p-side contact electrode to be electrically connected to the active layer through the substrate thickness direction, thereby improving electrical connection while reducing the need for mesa structures and enhancing the degree of integration of multiple laser elements on the substrate

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If multiple surface emitting laser elements are arranged on a substrate, then the light emission capability is improved, but the electrical connection complexity increases

Engineering Contradiction:
Improvenumber of light emitting elementsVSAvoidelectrical connection structure
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent combines multiple light emitting elements on a single substrate with a common first contact region for p-side contact. This merging approach allows multiple laser elements to share the same electrical connection infrastructure, thereby increasing the number of light emitting elements while reducing the overall electrical connection complexity and improving the degree of integration

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the integration density of surface emitting laser elements, leading to improved performance and stability, with reduced electrical resistance and enhanced light emission characteristics.

Implementation Method 1

A vertical cavity surface emitting laser (VCSEL) is a semiconductor laser that oscillates laser light in a direction perpendicular to a substrate

Methodology Applied
Scientific EffectLaser oscillation: Laser

Implementation Method 2

Each of the surface emitting laser elements includes a first reflecting mirror on the substrate; an active layer on the first reflecting mirror; and a second reflecting mirror on the active layer

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS12068577B2Surface emitting laser, surface emitting laser device, light source device, and detection apparatus
Publication Date: 2024.08.20 RICOH CO LTD
  • US12068577B2 patent drawing
  • US12068577B2 patent drawing
  • US12068577B2 patent drawing

AI summary

A surface emitting laser includes a substrate, a plurality of surface emitting laser elements on a first surface of the substrate, a first electrode electrically connected to a first conductive semiconductor of the surface emitting laser elements; and a second electrode electrically connected to a second conductive semiconductor of the surface emitting laser elements. Each of the surface emitting laser elements includes a first reflecting mirror on the substrate; an active layer on the first reflecting mirror; and a second reflecting mirror on the active layer. When a first contact region in which the first electrode and the first conductive semiconductor are connected to each other is on the first surface or in the first conductive semiconductor of the surface emitting laser elements. The first electrode is electrically connected to the light emitting units. The second electrode is electrically connected to each of the light emitting units.