VCSEL Subwavelength Grating for Stable Polarization Selection

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing vertical cavity surface emitting lasers (VCSELs) face challenges in achieving controlled linear polarized output due to the lack of effective asymmetry mechanisms, leading to unpredictable polarization selection and inefficient gain distribution.

Innovation Solution

Employing a subwavelength grating etched into the semiconductor surface of the VCSEL, which replaces the antireflective coating and creates a birefringence layer, selectively lowering the threshold for one polarization over the other by manipulating the laser's energy distribution within the cavity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If no asymmetry mechanism is built into the VCSEL, then the device structure remains simple, but the polarization selection becomes unpredictable and gain distribution becomes inefficient

Engineering Contradiction:
Improvepolarization controlVSAvoiddevice structure
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent introduces asymmetric structures into the VCSEL cavity, specifically using rectangular mesas with aspect ratios of 4:1 or higher, and asymmetric current aperture configurations. These asymmetric geometries create different optical path lengths and gain distributions for orthogonal polarizations, enabling predictable linear polarization selection. The asymmetric current injection further enhances this effect by concentrating carrier injection in specific regions, thereby controlling the dominant polarization mode.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent applies local quality by creating region-specific asymmetries within the VCSEL structure. The rectangular mesa confines the optical mode in specific directions, while the asymmetric current aperture provides localized carrier injection patterns. This local structural differentiation creates spatially varying gain and index profiles that favor one polarization over the other, achieving controlled linear polarization without requiring the entire device to be fundamentally different.

Inventive Principle:
Principle #3Local quality

2Reliability

If asymmetric structures are introduced to control polarization, then polarization selection becomes predictable, but the device structure and manufacturing complexity increase

Engineering Contradiction:
Improvepolarization stabilityVSAvoidmanufacturing process
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent segments the VCSEL structure into distinct functional regions with specific asymmetric characteristics. The mesa structure is segmented into vertical walls with controlled aspect ratios, the current aperture is segmented into asymmetric patterns, and the cavity is segmented to accommodate these features. This segmentation allows each component to be optimized independently for polarization control while maintaining compatibility with standard semiconductor manufacturing processes through separate lithography and etching steps.

Inventive Principle:
Principle #1Segmentation

3Ease of operation

If asymmetric current apertures are used, then polarization control is achieved, but the current distribution and heat generation become non-uniform

Engineering Contradiction:
Improvepolarization controlVSAvoidheat distribution
Core Design Contradiction:
Ease of operationVSTemperature

Solution Approach 1:

The patent employs dynamic current injection strategies where the current aperture configuration can be adjusted or optimized for different operating conditions. The asymmetric current aperture is designed to concentrate injection in regions that maximize polarization control while minimizing hot spot formation. The device can dynamically adapt its current distribution pattern to balance polarization control requirements with thermal management considerations, allowing operation across different current levels and temperatures.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The subwavelength grating provides strong polarization control by ensuring the laser preferentially selects the polarization with the lower threshold, enhancing the VCSEL's efficiency and stability without adding loss to the cavity.

Implementation Method 1

a subwavelength grating etched into the semiconductor surface of the VCSEL, which replaces the antireflective coating and creates a birefringence layer, selectively lowering the threshold for one polarization over the other

Methodology Applied
Scientific EffectBirefringence: Birefringence

Data Source

PatentUS12388235B2Tunable VCSEL polarization control with intracavity subwavelength grating
Publication Date: 2025.08.12 EXCELITAS TECHNOLOGIES CORP
  • US12388235B2 patent drawing
  • US12388235B2 patent drawing
  • US12388235B2 patent drawing

AI summary

A very strong selection mechanism is provided in a tunable vertical cavity surface emitting laser (VCSEL) by manipulating the laser threshold to be different for TE and TM polarization by a employing a subwavelength grating in the laser cavity. The laser selects the polarization with the lowest threshold. The grating does not diffract and does not add loss to the cavity. It works by creating a large birefringence layer between the semiconductor and air sub-cavities of the full VCSEL. Multilayer stack calculations show that this results in a lower threshold for the TM polarization over the TE. This subwavelength grating layer, in one embodiment, replaces the AR coating on the semiconductor surface.