VCSEL Grating Layer Transparent Electrode Design

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Solution Overview

Problem

Conventional semiconductor laser diodes with optical cavities parallel to the surface are not suitable for low-cost mass manufacturing and fabrication of two-dimensional arrays, limiting their application in displays, light sources, and optical fiber data links.

Innovation Solution

The development of vertical cavity surface emitting laser diodes (VCSELs) with a grating layer and transparent electrodes replaces the traditional DBR mirror structure and non-transparent electrodes, allowing for a more compact design that requires less current and facilitates the construction of arrays in a smaller space.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If conventional semiconductor laser diodes with optical cavities parallel to the surface are used, then light emission is achieved, but mass manufacturing and fabrication of two-dimensional arrays become costly and complex

Engineering Contradiction:
Improvemass manufacturing capabilityVSAvoidfabrication efficiency of arrays
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The patent inverts the conventional laser diode structure by changing the optical cavity orientation from parallel to perpendicular relative to the semiconductor wafer surface. This inversion enables vertical cavity surface emitting laser diodes (VCSELs) that can be fabricated using standard planar semiconductor manufacturing processes, allowing for low-cost mass production and two-dimensional arrays.

Inventive Principle:
Principle #13The other way round (Inversion)

2Volume of moving object

If VCSELs with grating layer and transparent electrodes are used, then device size is reduced and current requirement is lowered, but structural complexity increases

Engineering Contradiction:
Improvelaser diode sizeVSAvoidgrating layer structure
Core Design Contradiction:
Volume of moving objectVSDevice complexity

Solution Approach 1:

The patent introduces a grating layer with specific refractive index parameters and periodic structures to achieve wavelength-selective feedback and directional emission. By carefully controlling the grating period, depth, and refractive index contrast, the device achieves compact size and low current operation while the grating structure provides the necessary optical functionality.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in a more compact, energy-efficient laser diode capable of emitting light in a specific direction, suitable for various optical and electrical applications, with adjustable emission direction depending on the grating layer design.

Implementation Method 1

A grating layer having a predetermined index of refraction is disposed adjacent a top surface of the current concentrating layer. The grating layer processes photons emitted from the multiple quantum well structure

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

A grating layer having a predetermined index of refraction is disposed adjacent a top surface of the current concentrating layer

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 3

Electrical power is applied between electrodes creating a current flow across the active layer resulting in an electron population inversion which generates energy in the form of photons

Methodology Applied
Scientific EffectElectroluminescence: Electroluminescence

Implementation Method 4

surrounding reflective surfaces constructed from alternating layers of materials which direct light to an extraction point on the diode

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 5

The reflective regions are constructed from alternating layers of mirrors with different indices of refraction. The stacks form a structure known as a distributed Bragg reflector mirror structure

Methodology Applied
Scientific EffectDistributed Bragg Reflection:

Data Source

PatentUS7907654B2Laser diode with a grating layer
Publication Date: 2011.03.15 HEWLETT PACKARD ENTERPRISE DEV LP
  • US7907654B2 patent drawing
  • US7907654B2 patent drawing

AI summary

A laser diode is provided comprising a multiple quantum well structure, a current concentrating layer having an oxide-confined aperture, a grating layer having an index of refraction, and a transparent electrode, wherein the transparent electrode has an index of refraction less than the index of refraction of the grating layer.