VCSEL Reflector Structure With Groove-Filling Edge Support
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Solution Overview
Problem
The edge of the first reflection layer in vertical cavity surface emitting lasers collapses due to the formation of a groove on the edge of the second reflection layer during manufacturing, caused by differences in aluminum content and oxidation rates.
Innovation Solution
A protection layer, such as a silica or silicon nitride layer, is applied to cover and fill the oxidation groove, supporting the edge of the first reflection layer and preventing collapse, while also performing electrical protection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the aluminum content of the second reflection layer is increased to improve reflectivity, then the reflection performance is improved, but a groove forms on the edge during manufacturing causing the first reflection layer edge to collapse
Solution Approach 1:
The patent introduces an oxidation layer as an intermediary between the first and second reflection layers. This oxidation layer undergoes controlled oxidation to form an oxidation groove that compensates for the groove formed by differential shrinkage during manufacturing, thereby preventing edge collapse of the first reflection layer while maintaining the high aluminum content configuration for optimal reflectivity
Solution Approach 2:
The patent changes the physical and chemical parameters of the structure by introducing oxidation processes. The oxidation layer is subjected to controlled oxidation to create an oxidation groove with specific depth and dimensions, transforming the structure to accommodate the shrinkage-induced groove and prevent edge collapse while preserving reflection performance
2Manufacturing precision
If a protection layer is added to prevent edge collapse, then structural integrity is improved, but device complexity increases
Solution Approach 1:
The oxidation layer serves multiple functions: it acts as a structural support to prevent edge collapse, provides a pathway for stress relief through controlled oxidation groove formation, and maintains the integrity of the reflection layers. This multi-functionality reduces the need for additional dedicated support structures, thereby limiting the increase in device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The protection layer effectively supports the edge of the first reflection layer, preventing collapse and enhancing the reliability of the vertical cavity surface emitting laser.
Implementation Method 1
Arranging a protection layer on the laser precursor through an vapor deposition process
Implementation Method 2
Performing oxidation on the oxidation layer in the oxidation groove, so as to form an unoxidized region and an oxidized region surrounding the unoxidized region
Data Source
AI summary
Provided are a vertical cavity surface emitting laser and a manufacturing method thereof, the vertical cavity surface emitting laser comprises a laser precursor, and the laser precursor comprises a first reflector layer, an oxidation layer, a light-emitting layer and a second reflector layer which are stacked, wherein the second reflector layer comprises a plurality of first reflection layers and a plurality of second reflection layers, and a groove is formed on the side of the second reflection layer from the oxidation groove and in a direction away from the oxidation groove; a protection layer is arranged on the laser precursor, and the protection layer at least covers the inner wall of the oxidation groove, and the groove is filled with a part of the protection layer. The technical solution may avoid the collapse of the edge of the first reflection layer.