VCSEL Photodiode Layer Spacing for Tolerance-Stable Absorption

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Solution Overview

Problem

Conventional Vertical Cavity Surface Emitting Lasers (VCSELs) with integrated photodiodes face challenges in maintaining consistent light detection capability due to production tolerances, which affect the absorption of the photodiode and thus the performance, especially when using strained semiconductor materials for the absorbing layer.

Innovation Solution

The VCSEL design incorporates a photodiode with multiple absorbing layers spaced apart by a specific distance (d = (2k−1)λ/(4 m)), where λ is the wavelength of the laser light and k and m are natural numbers, to reduce the dependence on production tolerances and enhance absorption consistency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a thin absorbing layer is used to achieve high absorption with strained semiconductor material, then absorption capability is improved, but performance varies due to production tolerances

Engineering Contradiction:
Improveabsorption capabilityVSAvoidproduction tolerances
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The absorbing layer is divided into multiple thin absorbing layers spaced at specific intervals. This segmentation allows each layer to contribute to absorption while the distributed structure reduces sensitivity to position deviations caused by production tolerances, thereby maintaining consistent absorption capability across different production batches.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention changes the spatial parameter of the absorbing layer by introducing multiple layers at specifically calculated distances from the active region. This parameter optimization ensures that even with variations in layer thickness during epitaxial growth, the overall absorption remains consistent by distributing the absorption function across multiple positions.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the absorbing layer thickness is increased to improve absorption, then light detection capability is improved, but material strain limits the maximum thickness

Engineering Contradiction:
Improvelight detection capabilityVSAvoidabsorbing layer thickness
Core Design Contradiction:
ReliabilityVSLength of moving object

Solution Approach 1:

Instead of using a single thick absorbing layer that would exceed the strain limit, the invention segments the absorption function into multiple thin layers. Each layer remains within the strain tolerance for defect-free growth, while the cumulative effect of multiple layers achieves the desired total absorption and light detection capability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from a single-dimension solution (one thick layer) to a multi-dimensional arrangement (multiple thin layers spaced in distance). This dimensional change allows the system to achieve high absorption without increasing the thickness of any single layer beyond the strain limit, thereby improving light detection capability while respecting material constraints.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration results in a VCSEL with improved light detection characteristics and reduced sensitivity to production variations, enabling more precise measurements and consistent performance across different wafer lots.

Implementation Method 1

an absorption region having a plurality of absorbing layers configured to absorb the generated laser light

Methodology Applied
Scientific EffectOptical absorption: Absorption (EM radiation)

Data Source

PatentUS12107388B2Vertical cavity surface emitting laser with integrated photodiode
Publication Date: 2024.10.01 WESTERN DIGITAL TECHNOLOGIES INC
  • US12107388B2 patent drawing
  • US12107388B2 patent drawing
  • US12107388B2 patent drawing

AI summary

A vertical cavity surface emitting laser (VCSEL) emits laser light. The VCSEL has an optical resonator and a photodiode. The optical resonator has: a first mirror, an active region configured to generate laser light, and a second mirror. The active region is arranged between the first mirror and the second mirror. The photodiode is integrated in the optical resonator. The photodiode has: an absorption region having a plurality of absorbing layers configured to absorb the generated laser light. The absorbing layers are arranged spaced apart from one another by a distance d which satisfies the condition: d=(2k−1)λ/(4 m). Where λ is the wavelength of the laser light in the absorption region, and k and m are natural numbers ≥1.