VCSEL Emitter Array Layout Using Shared Vias and Oxidation Trenches
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Solution Overview
Problem
The existing configuration of vertical cavity surface emitting lasers limits the further reduction of size between emitters, hindering the miniaturization of these devices.
Innovation Solution
The solution involves sharing at least one of the via or oxidation trench between emitters, allowing these structures to occupy spare space and reduce the distance between emitters, thereby increasing emitter density and power density.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the size between emitters is continuously reduced to achieve miniaturization, then the device size decreases, but the configuration limitations prevent further reduction
Solution Approach 1:
The patent merges adjacent emitters by sharing common vias and oxidation trenches between them. Specifically, a via or oxidation trench serves dual purposes for neighboring emitters, reducing the total number of discrete structures and enabling closer emitter spacing while maintaining functional integrity.
Solution Approach 2:
The shared via or oxidation trench structure performs multiple functions: it serves as an electrical connection or isolation structure for one emitter while simultaneously serving the same function for adjacent emitters. This multi-functionality reduces overall device complexity and enables miniaturization.
2Quantity of substance
If emitters are arranged closer together, then emitter density increases, but the required spacing for individual via and oxidation trench structures prevents further densification
Solution Approach 1:
Adjacent emitters share common via and oxidation trench structures, eliminating redundant elements. The shared structure occupies the space between emitters, allowing emitter arrays to be packed more densely without compromising electrical isolation or connection functionality.
Solution Approach 2:
The shared via or oxidation trench is positioned such that it is spatially nested within the combined footprint of adjacent emitters, serving both structures simultaneously. This nesting arrangement maximizes space utilization and enables higher emitter density.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces the size between emitters, enhances emitter density, and improves the power density of the vertical cavity surface emitting lasers.
Implementation Method 1
an oxidation trench surrounds the light emitting window
Data Source
AI summary
A vertical cavity surface emitting laser includes a substrate, and emitters arranged in an array, where the emitters are located on a surface of the substrate. Each emitter of the emitters is provided with a light emitting window, a via and an oxidation trench, the light emitting window is used for emitting light, the via surrounds the light emitting window, the oxidation trench surrounds the light emitting window, and at least one of the via or the oxidation trench is shared by at least two emitters, thereby reducing the size between emitters in the vertical cavity surface emitting laser.