VCSEL Surface-Emitting Laser With Slow Light Amplification

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Solution Overview

Problem

Conventional surface-emitting lasers face limitations in achieving high-power output beyond the mW level, with array structures providing high output but suffering from non-uniform phase and wavelength, leading to wide oscillation spectrum width and large beam divergence, while photonic crystal structures are challenging to manufacture reliably.

Innovation Solution

A surface-emitting laser design incorporating a VCSEL and slow light SOA arranged laterally, with a seed light source and output unit sharing a VCSEL structure, featuring a relation between seed light and oscillation wavelengths to suppress return light and improve beam quality, and incorporating an air gap layer, low-refractive-index layers, and a zig-zag output unit configuration to enhance power output.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If array structure is employed to provide high output, then power output is improved to 10 W or more, but beam quality deteriorates with wide oscillation spectrum width and large beam divergence angle

Engineering Contradiction:
Improvepower outputVSAvoidbeam quality
Core Design Contradiction:
PowerVSStability of the object's composition

Solution Approach 1:

The laser system is segmented into multiple individual laser elements arranged in an array, where each element maintains uniform phase and wavelength characteristics independently. This segmentation allows high total power output while preserving beam quality through coherent combination of individual elements.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple laser elements are merged into a unified array structure with shared optical components and control systems. The individual elements are coherently combined to achieve high power output while maintaining uniform phase and wavelength, resolving the contradiction between power and beam quality.

Inventive Principle:
Principle #5Merging (Combining)

2Stability of the object's composition

If surface-machined structure is used to suppress high-order mode oscillation, then beam quality is improved, but power output is limited to 10 mW or less

Engineering Contradiction:
Improvebeam qualityVSAvoidpower output
Core Design Contradiction:
Stability of the object's compositionVSPower

Solution Approach 1:

The invention transitions from two-dimensional surface-machined structures to three-dimensional volume-based distributed feedback structures. This dimensional change enables suppression of high-order modes through volumetric optical feedback rather than surface relief, allowing higher power output while maintaining beam quality.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Power

If photonic crystal structure is employed to support watt-class high-power output, then power output is improved, but manufacturing complexity increases with fine cyclic structure requirements

Engineering Contradiction:
Improvepower outputVSAvoidmanufacturing complexity
Core Design Contradiction:
PowerVSEase of manufacture

Solution Approach 1:

The invention employs dynamically adjustable optical feedback mechanisms rather than static fine cyclic photonic crystal structures. This allows watt-class power output through controllable distributed feedback, reducing manufacturing complexity while maintaining high power capability.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves high-power output with improved beam quality, narrow spectrum width, and reduced size and cost, supporting watt-class high-power operation.

Implementation Method 1

the seed light propagates as a slow light through the VCSEL structure in a longitudinal direction while being reflected multiple times in the VCSEL structure in a vertical direction

Methodology Applied
Scientific EffectLight reflection: Reflection

Implementation Method 2

an output light is extracted from an upper surface of the VCSEL structure

Methodology Applied
Scientific EffectLaser emission: Laser

Data Source

PatentEP3425755B1Surface light emitting laser
Publication Date: 2023.08.09 TOKYO INST OF TECH
  • EP3425755B1 patent drawingFigure 1
  • EP3425755B1 patent drawingFigure 2
  • EP3425755B1 patent drawingFigure 3

AI summary

A surface-emitting laser 1 includes an output unit 4. The output unit 4 has an oblong-shaped VCSEL (vertical-cavity surface-emitting laser) structure. The output unit 4 operates in an oscillation state in which a current that is larger than the oscillation threshold value is injected. The output unit 4 receives a coherent seed light via a coupling surface 3 at one end of the VCSEL structure in the longitudinal direction thereof. The seed light thus received propagates as a slow light through the VCSEL structure in the longitudinal direction thereof while being reflected multiple times in the vertical direction within the VCSEL structure. An output light L2 is extracted from the upper surface of the VCSEL structure.