GaN VECSEL Grooves Relieve Strain Blueshift

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Vertical external-cavity surface-emitting lasers (VECSELs) with InGaN/GaN multiple quantum well structures face a blueshift in emission wavelength due to piezo electric field effects when the intensity of excitation laser light is increased, leading to reduced laser light intensity, especially when using semi-polar or non-polar substrates which are prone to oxygen impurity doping issues.

Innovation Solution

A surface-emitting device with a GaN c-axis oriented base substrate and a group 13 nitride emitter structure featuring a DBR layer and active layer, where grooves are formed between unit deposition parts to relieve strains, reducing the blueshift and maintaining high laser light intensity even at high excitation levels.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If the intensity of excitation laser light is increased to increase laser output power, then the laser output power is improved, but the surface-emitting device generates more heat causing error in position or optical axis of optical device, which attenuates the intensity of emitted laser light

Engineering Contradiction:
Improvelaser output powerVSAvoidposition accuracy of optical device
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The surface-emitting device is divided into multiple independent unit deposition parts (first unit deposition part, second unit deposition part, etc.) arranged in an array. Each unit can be independently controlled and optimized. This segmentation allows the device to handle heat distribution more effectively across multiple smaller units rather than concentrating heat in a single large structure, thereby maintaining positional accuracy while achieving high total output power.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs a hierarchical structure where unit deposition parts are nested within a larger array configuration. Each unit contains nested layers (DBR layers, active layers, buffer layers) that are systematically organized. This nested arrangement enables efficient heat management at multiple scales, allowing high power operation without compromising the positional stability of individual optical components.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Power

If the intensity of excitation laser light is increased to increase laser output power, then the laser output power is improved, but the surface-emitting device generates more heat, which attenuates the intensity of the laser light emitted from the optical resonator

Engineering Contradiction:
Improvelaser output powerVSAvoidintensity of emitted laser light
Core Design Contradiction:
PowerVSIllumination intensity

Solution Approach 1:

By dividing the surface-emitting device into multiple unit deposition parts, the heat generation is distributed across several independent units. This segmentation prevents localized overheating that would otherwise cause optical axis deviation and attenuation of emitted laser light intensity, while still achieving high total output power through the combined operation of all units.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each unit deposition part is designed with specific local characteristics including DBR layers with particular reflection ratios and active layers with optimized compositions. This local optimization ensures that each unit operates efficiently at its designated position, maintaining consistent light emission quality across the entire array even at high excitation intensities.

Inventive Principle:
Principle #3Local quality

3Ease of manufacture

If an MQW structure including InGaN/GaN is used as surface-emitting device to realize laser light in the range of blue to green, then the need for SHG device is eliminated, but more carriers are excited causing a blueshift due to shielding piezo electric field inside active layer, which shifts the wavelength from designed wavelength and attenuates laser light intensity

Engineering Contradiction:
Improvecost reduction by eliminating SHG deviceVSAvoidwavelength accuracy
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

Different unit deposition parts are designed with varying local compositions and structures to compensate for the piezoelectric field effects. By adjusting the local quality of each unit (such as InGaN composition ratios, layer thicknesses, and buffer layer configurations), the blueshift can be minimized while maintaining the desired blue-to-green laser emission, thus preserving wavelength accuracy without requiring SHG devices.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent employs parameter optimization in the MQW structure design, including adjusting the composition ratios of InGaN layers, the thickness of active and buffer layers, and the configuration of DBR layers. These parameter changes are specifically tailored to reduce the piezoelectric field strength and minimize carrier shielding effects, thereby maintaining accurate wavelength emission in the blue-to-green range.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces blueshift and maintains high intensity of emitted laser light across a wide range, enhancing the performance and cost-effectiveness of VECSELs by using a polycrystalline GaN substrate with c-axis orientation and strategically placed grooves, thereby optimizing the emission wavelength and light emission efficiency.

Implementation Method 1

a DBR layer having a distributed Bragg reflection structure

Methodology Applied
Scientific EffectDistributed Bragg reflection: Bragg Diffraction

Implementation Method 2

an active layer having a multiple quantum well structure and generating excitation emission in response to irradiation with external laser light

Methodology Applied
Scientific EffectStimulated emission: Laser

Implementation Method 3

causing a blueshift (a shift toward a shorter wavelength of an emission wavelength) due to an effect of shielding a piezo electric field inside an active layer

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS10541514B2Surface-emitting device, vertical external-cavity surface-emitting laser, and method for manufacturing surface-emitting device
Publication Date: 2020.01.21 NGK INSULATORS LTD
  • US10541514B2 patent drawing
  • US10541514B2 patent drawing
  • US10541514B2 patent drawing

AI summary

A vertical external-cavity surface-emitting laser (VECSEL) whose blueshift is reduced also in a high intensity range of emitted laser light is realized. A surface-emitting device for VECSEL includes a base substrate made of GaN and c-axis oriented, and an emitter structure formed of a group 13 nitride semiconductor and provided on the base substrate. The emitter structure is formed of unit deposition parts, each of which is provided on the base substrate and includes a DBR layer having a distributed Bragg reflection structure and an active layer that has a multiple quantum well structure and generates excitation emission in response to irradiation with external laser light. A c-axis orientation of each of the unit deposition parts conforms to the c-axis orientation of the base substrate located directly below the unit deposition parts. Grooves are formed between the unit deposition parts.