Vector Print Data Skew Transformation for Lithography Throughput
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Solution Overview
Problem
Micro-lithographic printing processes face inefficiencies due to the time required for the writing head to reset after a scan, which reduces printing speed and throughput, especially in systems with mechanical movements over large distances.
Innovation Solution
A method and device that perform a skew transformation of vector print data in each scan strip, opposite to the scan velocity and proportional to its magnitude, to enhance printing efficiency and maintain pattern accuracy during bi-directional scans, allowing for increased throughput without the need for complex mechanical adjustments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the writing head performs mechanical reset movements after a scan, then the printing process can prepare for the next scan strip, but the printing speed and throughput are reduced due to the time required for these reset movements
Solution Approach 1:
The patent applies preliminary action by performing a skew transformation on the vector print data before the actual scanning and printing process. This preprocessing step anticipates and compensates for the scan velocity effects in advance, eliminating the need for time-consuming mechanical reset movements and adjustments during the printing process, thereby reducing reset time and increasing printing throughput
2Productivity
If the scan velocity is increased to improve printing speed, then productivity increases, but pattern accuracy and printing precision deteriorate due to mechanical limitations and motion errors
Solution Approach 1:
The patent applies parameter changes by transforming the vector print data with a skew transformation that compensates for scan velocity effects. This mathematical transformation adjusts the pattern coordinates based on the scan velocity parameters, allowing high scan velocities to be used while maintaining pattern accuracy. The skew transformation dynamically adjusts geometric parameters of the pattern to counteract the distortion caused by high-speed scanning
Data Source
AI summary
A method for processing print data defining a pattern to be printed comprises obtaining (S10) of vector print data for the pattern to be printed. The vector print data is divided (S12) into vector print data of scan strips, wherein each scan strip is associated with a scan velocity. A skew transformation of the vector print data is performed (S14) in each scan strip. The skew transformation is performed in a direction opposite to respective scan velocity and with a magnitude proportional to a magnitude of the scan velocity. A method for printing a pattern, a device for processing print data and a printing device according to the same principles are also disclosed.