Transport Vehicle Cleaning Device with Frame Cover for Particle Control
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Solution Overview
Problem
Transport vehicles in clean rooms for semiconductor and display device manufacturing generate foreign particles during operation, which can contaminate the manufacturing line by adhering to and scattering from the vehicle surfaces, leading to potential contamination of the manufacturing process.
Innovation Solution
A transport vehicle cleaning device is designed to include a housing wrapping the driving rail and movement path, with fans generating downward airflow, a cleaning gas injector, an exhaust unit, and a frame cover to prevent particles from adhering to the lower parts of the vehicle, ensuring a closed internal space for effective cleaning and preventing re-adherence of scattered particles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If cleaning gas is injected towards the upper part of the transport vehicle to remove particles, then cleaning effectiveness is improved, but particles may scatter and adhere to the lower part of the vehicle
Solution Approach 1:
The transport vehicle is divided into upper and lower parts with respect to particle contamination. The frame cover segments the cleaning space to isolate the lower part from scattered particles, allowing the upper part to be cleaned effectively without contaminating the lower part.
Solution Approach 2:
The frame cover acts as an intermediary barrier between the cleaning gas flow and the lower part of the transport vehicle. It prevents particles scattered by the cleaning gas from reaching and adhering to the lower part, while still allowing the cleaning process to proceed.
2Ease of operation
If the frame is left open for easy access and maintenance, then ease of operation is improved, but particles can adhere to the lower part of the vehicle
Solution Approach 1:
The frame cover is designed to be movable, allowing it to be opened when access to the lower part of the transport vehicle is needed for maintenance or loading, and closed during the cleaning process to prevent particle adhesion. This dynamic configuration allows the system to adapt between accessibility and protection needs.
3Object-affected harmful factors
If a closed cleaning space is created to prevent particle scattering, then contamination control is improved, but device complexity increases
Solution Approach 1:
The frame cover serves multiple functions: it acts as a barrier to prevent particle adhesion, defines the cleaning space boundaries, and can be opened or closed based on operational needs. This multi-functionality reduces the need for additional separate components, thereby limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The cleaning device effectively prevents particles from adhering to the lower parts of the transport vehicle, reducing contamination risks and improving the cleanliness of the manufacturing environment by using downward airflow and a frame cover to contain and remove foreign matter.
Implementation Method 1
a plurality of fans disposed at an upper part of the housing and generating a downward airflow in the cleaning space
Implementation Method 2
a cleaning gas injector disposed at a ceiling of the housing and injecting a cleaning gas towards the transport vehicle in the cleaning space of the housing
Implementation Method 3
an exhaust unit provided at a lower part of the housing and exhausting the cleaning gas supplied to the cleaning space and a foreign matter removed from the transport vehicle from the cleaning space
Data Source
AI summary
A transport vehicle cleaning device that cleans a transport vehicle incudes a housing including a cleaning space accommodating the transport vehicle for cleaning, a plurality of fans disposed at an upper part of the housing and generating a downward airflow in the cleaning space, a cleaning gas injector disposed at a ceiling of the housing and injecting a cleaning gas towards the transport vehicle in the cleaning space of the housing, an exhaust unit provided at a lower part of the housing and exhausting the cleaning gas supplied to the cleaning space and a foreign matter removed from the transport vehicle from the cleaning space, and a frame cover disposed in the housing and configured to completely cover opposite openings of the frame in the housing to form a closed internal space of the frame separated from the cleaning space.