Idle Vehicle Parking Assignment in Semiconductor Manufacturing

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Solution Overview

Problem

In semiconductor manufacturing, the inefficient assignment of material transport vehicles to parking locations leads to variability in transit times and throughput, as existing systems struggle to balance vehicle distribution and utilization, resulting in increased retrieval times and potential congestion.

Innovation Solution

A method and system that utilize a material handling controller to determine optimal parking locations for idle vehicles based on cost factors including expected transit times, load priorities, and vehicle availability, employing a linear mixed-integer programming model to prioritize parking assignments and optimize vehicle distribution across the manufacturing system.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If idle material handling vehicles are distributed randomly or uniformly across the fabrication facility, then the system structure remains simple, but the retrieval time variability increases and system throughput decreases

Engineering Contradiction:
Improvesystem throughputVSAvoidvehicle assignment system complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The system performs preliminary actions by proactively assigning idle vehicles to parking locations before actual retrieval requests occur. The vehicle assignment system calculates optimal parking locations based on predicted future demands, load priorities, and current vehicle distributions, ensuring vehicles are positioned in advance to minimize retrieval times when needed.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The vehicle assignment system implements dynamic adjustment of vehicle distributions based on changing system conditions. It continuously monitors load priorities, tool demands, and vehicle locations, then dynamically reassigns idle vehicles to different parking locations to optimize retrieval times and reduce variability as system conditions evolve.

Inventive Principle:
Principle #15Dynamics

2Reliability

If the number of idle material handling vehicles in a controlling area is increased, then more vehicles are available for high-priority loads, but vehicle traffic increases and delivery times are extended

Engineering Contradiction:
Improvevehicle availability for high-priority loadsVSAvoiddelivery time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The system applies local quality by assigning different numbers of idle vehicles to different controlling areas based on specific local conditions. It evaluates load priorities, tool demands, and current vehicle distributions in each area, then assigns vehicles to parking locations in areas where they are most needed for high-priority loads, rather than uniformly distributing vehicles across all areas.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The vehicle assignment system changes parameters by dynamically adjusting the number and locations of idle vehicles based on varying system conditions. It modifies vehicle assignment decisions according to load priorities, tool demands, and current vehicle distributions, optimizing the balance between vehicle availability and delivery times under different operating conditions.

Inventive Principle:
Principle #35Parameter changes

3Speed

If idle material handling vehicles are concentrated in one controlling area, then retrieval time for that area is reduced, but the distribution balance across the facility deteriorates and overall retrieval time variability increases

Engineering Contradiction:
Improveretrieval speed in specific areaVSAvoidvehicle distribution balance
Core Design Contradiction:
SpeedVSStability of the object's composition

Solution Approach 1:

The system dynamically balances vehicle distributions across controlling areas by continuously evaluating system conditions and adjusting assignments accordingly. It prevents excessive concentration of idle vehicles in any single area while ensuring adequate availability where needed, adapting to changing demands to maintain overall distribution balance and reduce retrieval time variability across the entire facility.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The vehicle assignment system performs preliminary assignments that consider future demand patterns across multiple controlling areas. It proactively positions idle vehicles in parking locations that will optimize future retrieval operations while maintaining balanced distributions, preventing both over-concentration and under-utilization in any single area.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS8055533B2Method and apparatus for assigning material transport vehicle idle locations
Publication Date: 2011.11.08 ADVANCED MICRO DEVICES INC
  • US8055533B2 patent drawing
  • US8055533B2 patent drawing
  • US8055533B2 patent drawing

AI summary

A method for determining parking assignments for material handling vehicles in a manufacturing system is provided. The manufacturing system is operable to perform fabrication processes on a plurality of loads. The method includes identifying at least one idle material handling vehicle. A first cost factor associated with expected transit times for the at least one idle material handling vehicle to available parking locations in the manufacturing system is determined. A second cost factor based on a number of loads available to be serviced by the at least one idle material handling vehicle in the parking locations and relative priorities assigned to the loads is determined. A parking location for the at least one idle material handling vehicles is determined based on the first and second cost factors. A parking request is issued to the at least one idle material handling vehicle based on the determined parking locations.