Chemical Supply Automation With Verified Robotic Container Transfer

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Solution Overview

Problem

Existing chemical supply systems face challenges in preventing safety accidents and improving operational efficiency during the handling and transfer of chemical containers in semiconductor processes.

Innovation Solution

A chemical supply system incorporating a chemical container receiving station, temporary storage, and robots (first and second robots) for transferring chemical containers, equipped with inspection capabilities and automated handling to ensure safe and efficient transfer operations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If manual handling of chemical containers is used, then operational flexibility is maintained, but safety accidents occur more frequently and operational efficiency is reduced

Engineering Contradiction:

ImprovesafetyVSAvoidautomation level

Core Design Contradiction:

ReliabilityVSExtent of automation

Solution Approach 1:

The system enables automated self-service through robots that autonomously perform chemical container handling operations. The first robot automatically transports containers from the receiving station to temporary storage or the chemical supply device, while the second robot automatically carries containers into the chemical supply device, eliminating manual intervention and associated safety risks

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

Manual mechanical handling is replaced with automated robotic systems. The first and second robots use automated mechanisms including grippers, conveyors, and positioning systems to handle chemical containers, substituting human operators with automated mechanical systems that provide consistent, safe operations

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Productivity

If manual transfer operations are performed, then system complexity is reduced, but operational efficiency is lowered and errors increase

Engineering Contradiction:

Improveoperational efficiencyVSAvoidsystem complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The chemical supply system is segmented into distinct functional modules: a chemical container receiving station for inspection and confirmation, temporary storage for buffering, a chemical supply device for distribution, and specialized first and second robots for transfer operations. This segmentation allows each component to perform its specific function efficiently while maintaining overall system productivity

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The temporary storage area acts as an intermediary between the chemical container receiving station and the chemical supply device. It receives containers from the first robot and supplies them to the second robot, facilitating smooth transitions and reducing the complexity of direct point-to-point operations while maintaining high operational efficiency

Inventive Principle:

Principle #24Intermediary (Mediator)

3Measurement precision

If chemical container inspection is performed manually, then inspection time is reduced, but measurement precision and reliability of chemical information verification deteriorate

Engineering Contradiction:

Improvechemical information verification accuracyVSAvoidinspection time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

Manual inspection is replaced with automated inspection systems at the chemical container receiving station. Sensors and detection mechanisms automatically verify chemical information on containers, ensuring high measurement precision and reliability while the system continues to operate at high speed without significant time loss

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS12415678B2Chemical supply system

Publication Date: 2025.09.16 SAMSUNG ELECTRONICS CO LTD

AI summary

A chemical supply system, includes: a chemical container receiving station configured to receive a chemical container, inspect chemical information of the chemical container and confirm the chemical information; a temporary storage configured to store the chemical container; a chemical supply device configured to supply a chemical in the chemical container to a place of use of the chemical; a first robot configured to transport the chemical container for which the chemical information is confirmed from the chemical container receiving station; and a second robot configured to carry the chemical container transported by the first robot into the chemical supply device.