Vertical Batch Furnace Dual Carousel Storage
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Solution Overview
Problem
Existing vertical batch furnace assemblies face challenges in increasing storage capacity without expanding their size, which can lead to a larger and more costly apparatus.
Innovation Solution
The design incorporates two cassette storage carousels with a single cassette handler that transfers wafer cassettes between the carousels and a wafer transfer position, allowing for a compact footprint and enhanced storage capacity without requiring additional space, featuring a wafer transfer opening and a wafer handler for efficient wafer transfer between cassettes and a wafer boat.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the storing capacity of the vertical batch furnace assembly is increased, then more wafer cassettes can be stored, but the apparatus size becomes bigger and more costly
Solution Approach 1:
The patent transitions from a single-layer carousel design to a two-level stacked carousel configuration. The first cassette storage carousel is positioned at a first level, and the second cassette storage carousel is positioned at a second level above the first level. This vertical stacking arrangement increases storing capacity by utilizing the vertical dimension rather than expanding horizontally, thereby maintaining a compact apparatus footprint while accommodating more wafer cassettes.
2Quantity of substance
If more cassette storage carousels are added, then storing capacity increases, but the device complexity increases
Solution Approach 1:
The single cassette handler is designed with multi-functionality to serve both the first cassette storage carousel and the second cassette storage carousel. The handler can transfer wafer cassettes between either carousel and the wafer transfer position, eliminating the need for separate handlers for each carousel. This universal design increases storing capacity through dual carousels while avoiding the complexity increase that would result from adding additional dedicated handlers.
Data Source
AI summary
A vertical batch furnace assembly for processing wafers comprising a cassette handling space, a wafer handling space, and an internal wall separating the cassette handling space and the wafer handling space. The cassette handling space is provided with a cassette storage configured to store a plurality of wafer cassettes provided with a plurality of wafers. The cassette handling space is also provided with a cassette handler configured to transfer wafer cassettes between the cassette storage and a wafer transfer position. The wafer handling space is provided with a wafer handler configured to transfer wafers between a wafer cassette in the wafer transfer position and a wafer boat in a wafer boat transfer position. The internal wall is provided with a wafer transfer opening adjacent the wafer transfer position for a wafer cassette from or to which wafers are to be transferred. The cassette storage comprises two cassette storage carousels.