Vertical Beam Gravimetric Sensor for High Surface Density
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Solution Overview
Problem
Existing electromechanical detection devices, particularly resonant devices, face challenges in maximizing capture surface area and achieving high active surface density due to their one-dimensional elements in the plane of the substrate, leading to low active surface density and limited sensitivity in applications like chemical and biological sensing.
Innovation Solution
The device features detection means anchored to the beam in a layer parallel to the plane, with a reception area in one plane being greater than the beam section in another plane, allowing for a network of beams with increased capture surface and integrated actuation and detection means for enhanced sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If one-dimensional beam elements are used in the plane of the substrate, then the device structure is simple, but the active surface density and capture surface area are limited
Solution Approach 1:
The patent transitions from one-dimensional planar beam elements to three-dimensional vertically-oriented beams extending perpendicular to the substrate. This dimensional change allows the beams to achieve significantly greater effective surface area and capture volume while maintaining structural simplicity through vertical alignment rather than lateral expansion.
2Area of stationary object
If the beam dimensions are increased to maximize capture area, then the sensitivity per unit area decreases
Solution Approach 1:
By orienting beams vertically in the third dimension rather than expanding laterally in the plane, the patent achieves increased capture surface area without sacrificing sensitivity. The vertical configuration maintains high aspect ratios that preserve mechanical sensitivity while providing extended capture volume and surface area for particle interaction.
3Area of stationary object
If multiple beams are arranged in a network to increase capture area, then the device complexity increases
Solution Approach 1:
The patent combines multiple functional elements into an integrated vertical beam structure where actuation and detection means are merged with the beam itself. This integration approach increases capture surface area through vertical arrays while managing device complexity by consolidating functions rather than adding separate lateral components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly increases the capture surface density and sensitivity, enabling the detection of particles and forces with higher accuracy and efficiency, particularly in chemical and biological sensing applications.
Implementation Method 1
The resonance frequency of the resonator then becomes equal to: ω0 = √(k/m). The peaks of the frequency responses (in open loop), before and after deposition of the mass mp, are therefore shifted by an amount Δf
Implementation Method 2
The means of detecting the displacement of the beam are chosen from among the means of detection using piezoresistive strain gauges
Implementation Method 3
capacitive means of detection
Implementation Method 4
piezoelectric means of detection
Data Source
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Figure 5~7
AI summary
An electromechanical detection device, particularly for gravimetric detection, and a method for manufacturing the device. The electromechanical detection device comprises a support (4) having a face defining a plane (6), at least one beam (8) capable of moving relative to the support, and means (10) for detecting the beam's displacement, providing a signal that is a function of the displacement. The beam is anchored to the support at one end and substantially perpendicular to said plane, and the other end of the beam has at least one receiving zone (12) for receiving one or more particles (14) that cause or modify the beam's displacement, in order to determine at least one physical property of the particle or particles from the signal. According to the invention, the detection means are located between the receiving zone and the support.