Vertical Beam Gravimetric Sensor for High-Density Particle Capture

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Solution Overview

Problem

Existing electromechanical detection devices, particularly resonant devices, face challenges in maximizing capture surface area and achieving high active surface density due to their one-dimensional elements in the plane of the substrate, leading to low capture surface efficiency and difficulty in detecting particles with low concentrations or small masses, especially in applications like chemical sensors and mass spectrometry.

Innovation Solution

The development of an electromechanical detection device with beams substantially perpendicular to the support, where each beam is anchored by one end and has a reception zone at the other end for particle detection, allowing for increased capture surface area and improved detection efficiency through enhanced displacement detection means located between the reception area and the support.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If one-dimensional beam elements are used in the plane of the substrate, then the device structure is simple, but the active surface density and capture surface area are limited

Engineering Contradiction:
Improvedevice structureVSAvoidactive surface density
Core Design Contradiction:
Device complexityVSArea of stationary object

Solution Approach 1:

The patent transitions from one-dimensional planar beam elements to three-dimensional vertically-oriented beams extending perpendicular to the substrate. This dimensional change allows the beams to achieve significantly greater effective surface area and capture volume while maintaining structural simplicity through vertical alignment rather than lateral expansion.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Area of stationary object

If the beam dimensions are increased to maximize capture area, then the sensitivity per unit area decreases

Engineering Contradiction:
Improvecapture surface areaVSAvoidsensitivity
Core Design Contradiction:
Area of stationary objectVSMeasurement precision

Solution Approach 1:

By orienting beams vertically in the third dimension rather than expanding laterally in the plane, the patent achieves increased capture surface area without sacrificing sensitivity. The vertical configuration maintains high aspect ratios that preserve mechanical sensitivity while providing extended capture volume and surface area for particle interaction.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Area of stationary object

If multiple beams are arranged in a network to increase capture area, then the device complexity increases

Engineering Contradiction:
Improvecapture surface areaVSAvoidnetwork structure
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The patent combines multiple functional elements into an integrated vertical beam structure where actuation and detection means are merged with the beam itself. This integration approach increases capture surface area through vertical arrays while managing device complexity by consolidating functions rather than adding separate lateral components.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly increases the capture surface area and detection efficiency, enabling the detection of particles with low concentrations and small masses, improving the sensitivity and precision of applications such as chemical sensors and mass spectrometry.

Implementation Method 1

The resonance frequency of the resonator then becomes equal to: ω0 = √(k/m). The peaks of the frequency responses (in open loop), before and after deposition of the mass mp, are therefore shifted by an amount Δf

Methodology Applied
Scientific EffectResonant frequency shift: Resonance

Implementation Method 2

The means of detecting the displacement of the beam are chosen from among the means of detection using piezoresistive strain gauges

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Implementation Method 3

capacitive means of detection

Methodology Applied
Scientific EffectCapacitive effect: Capacitance

Implementation Method 4

piezoelectric means of detection

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentEP2866020A1Electromechanical detection device for gravimetric detection, and method for manufacturing the device
Publication Date: 2015.04.29 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP2866020A1 patent drawingFigure 1~2
  • EP2866020A1 patent drawingFigure 3~4
  • EP2866020A1 patent drawingFigure 5~7

AI summary

An electromechanical detection device, particularly for gravimetric detection, and a method for manufacturing the device. The electromechanical detection device comprises a support (4) having a face defining a plane (6), at least one beam (8) capable of moving relative to the support, and means (10) for detecting the beam's displacement, providing a signal that is a function of the displacement. The beam is anchored to the support at one end and substantially perpendicular to said plane, and the other end of the beam has at least one receiving zone (12) for receiving one or more particles (14) that cause or modify the beam's displacement, in order to determine at least one physical property of the particle or particles from the signal. According to the invention, the detection means are located between the receiving zone and the support.