Vertical BJT Double Base Structure for Current Gain

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Solution Overview

Problem

The existing CMOS process for manufacturing vertical NPN BJT devices is limited in achieving optimal current gain due to fixed thickness and width of the base layer, restricting the DC performance of the device.

Innovation Solution

A vertical bipolar junction transistor is designed with first and second collector areas in different epitaxial layers, an emitter area interposed between them, and a double base structure formed over these layers to enhance current flow, allowing for increased current gain.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a single base layer is used in the vertical BJT device, then the manufacturing process is simple, but the current gain cannot be optimized

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoidcurrent gain
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The base region is divided into two separate base layers (first base layer and second base layer) with different doping types and concentrations. This segmentation allows each base layer to be independently optimized for specific functions: the first base layer controls electron injection while the second base layer controls hole injection, thereby achieving optimized current gain without significantly complicating the manufacturing process

Inventive Principle:
Principle #1Segmentation

2Ease of manufacture

If the base layer thickness and width are fixed by the manufacturing process, then the manufacturing is straightforward, but the optimal current gain cannot be achieved

Engineering Contradiction:
Improvemanufacturing straightforwardnessVSAvoidDC performance
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

Different regions of the base structure are assigned different doping types (P-type and N-type) and doping concentrations. The first base layer has P-type doping while the second base layer has N-type doping, creating local quality variations that enable independent optimization of electron and hole transport properties, thereby achieving optimal DC performance while maintaining manufacturing feasibility

Inventive Principle:
Principle #3Local quality

3Reliability

If a double base structure is implemented, then the collector current gain is significantly increased, but the device complexity increases

Engineering Contradiction:
Improvecollector current gainVSAvoiddevice structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The double base structure is integrated into the existing vertical BJT architecture by combining the first and second base layers within the same device structure. The emitter connects to both base layers, and the collector collects carriers from both bases, merging multiple functions into a unified structure that achieves high current gain without requiring separate devices

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The double base structure in the vertical BJT device significantly increases the collector current gain compared to similar-sized related BJTs, improving the device's DC performance by allowing collector current to flow both up and down.

Implementation Method 1

A first collector area may be formed by implanting first impurity type ions into the substrate

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Implementation Method 2

Second impurity type impurities may be implanted into the first epitaxial layer

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Implementation Method 3

A p-well may be formed by implanting the second impurity type impurities into the second epitaxial layer

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Data Source

PatentUS7728408B2Verticle BJT, manufacturing method thereof
Publication Date: 2010.06.01 DONGBU HITEK CO LTD
  • US7728408B2 patent drawing
  • US7728408B2 patent drawing
  • US7728408B2 patent drawing

AI summary

A vertical BJT which has a maximal current gain for a photodiode area. According to embodiments, since the BJT can be formed together with the photodiode, and collector current flows up and down based on the double base structure, the magnitude of the current may be increased.