Vertical BJT Emitter Structure for Lower Base-Emitter Capacitance

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Solution Overview

Problem

Bipolar junction transistor (BJT) designs that aim to decrease base-emitter capacitance (Cbe) often result in larger device sizes and degradation of other performance metrics such as maximum oscillation frequency (fmax) or breakdown voltage (BV).

Innovation Solution

A semiconductor structure with a bipolar junction transistor (BJT) featuring a dielectric layer and emitter regions with specific geometries, including a first emitter portion extending vertically and a second emitter portion extending laterally, where the dielectric and additional dielectric layers are wider than the first emitter portion, and at least a section of the second emitter portion is narrower, creating cavities that can be filled with dielectric material or left as air/gas pockets to reduce Cbe without affecting device size or other performance metrics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If techniques are used to decrease base-emitter capacitance (Cbe), then cut-off frequency (fT) is improved, but device size increases and other performance metrics degrade

Engineering Contradiction:
Improvecut-off frequency (fT)VSAvoiddevice size
Core Design Contradiction:
SpeedVSArea of stationary object

Solution Approach 1:

The emitter region transitions from a conventional planar structure to a three-dimensional structure with vertical and lateral portions. The first emitter portion extends vertically through the dielectric layer, while the second emitter portion extends laterally, creating a multi-dimensional configuration that reduces Cbe without proportionally increasing device footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The emitter region is divided into distinct segments: a first emitter portion extending vertically and a second emitter portion extending laterally. This segmentation allows each portion to serve specific functions - the vertical portion minimizes capacitance while the lateral portion controls the electric field - thereby improving fT without significantly increasing overall device size.

Inventive Principle:
Principle #1Segmentation

2Speed

If techniques are used to decrease base-emitter capacitance (Cbe), then cut-off frequency (fT) is improved, but maximum oscillation frequency (fmax) degrades

Engineering Contradiction:
Improvecut-off frequency (fT)VSAvoidmaximum oscillation frequency (fmax)
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

Different portions of the emitter region are given different geometrical properties to optimize local electric field distribution. The vertical first emitter portion minimizes capacitance for improved fT, while the lateral second emitter portion is shaped to control field distribution and prevent degradation of fmax, achieving local optimization of both performance metrics.

Inventive Principle:
Principle #3Local quality

3Speed

If techniques are used to decrease base-emitter capacitance (Cbe), then cut-off frequency (fT) is improved, but breakdown voltage (BV) degrades

Engineering Contradiction:
Improvecut-off frequency (fT)VSAvoidbreakdown voltage (BV)
Core Design Contradiction:
SpeedVSStrength

Solution Approach 1:

The emitter structure implements local quality variations where the vertical first emitter portion reduces capacitance while the lateral second emitter portion is configured to distribute electric stress uniformly. This local optimization maintains breakdown voltage by preventing field concentration at critical interfaces, thereby improving fT without sacrificing BV.

Inventive Principle:
Principle #3Local quality

Data Source

PatentEP4235796A1Vertical bipolar junction transistor and method of manufacturing
Publication Date: 2023.08.30 GLOBALFOUNDRIES US INC
  • EP4235796A1 patent drawingFigure 1.1A
  • EP4235796A1 patent drawingFigure 1.1B
  • EP4235796A1 patent drawingFigure 1.2A

AI summary

A semiconductor structure comprising: a dielectric layer (162); an emitter region (140) comprising: a first emitter portion (141) extending through the dielectric layer (162); and a second emitter portion (142) on the first emitter portion and further extending laterally onto the dielectric layer (162); and an additional dielectric layer (163) on the second emitter portion, wherein the dielectric layer (162), the second emitter portion (142), and the additional dielectric layer (163) are wider than the first emitter portion (141), and wherein at least a section of the second emitter portion (142) is narrower than the dielectric layer (162) and the additional dielectric layer (163). Preferably, the second emitter portion (142) increases in width between the dielectric layer (162) and the additional dielectric layer (163)