Vertical Bipolar Junction Transistor Structure for Ft and Fmax Gain

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Solution Overview

Problem

There is a need for improved structures and methods for fabricating bipolar junction transistors that enhance high-frequency performance and current handling capabilities.

Innovation Solution

A vertical bipolar junction transistor structure is developed, featuring multiple intrinsic bases and collectors with a narrow base width, achieved through a tiered semiconductor layer arrangement and epitaxial growth processes, allowing for efficient fabrication of integrated circuit chips with enhanced performance parameters.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional single-base bipolar junction transistor structure is used, then the fabrication process is simple, but the high-frequency performance (Ft and Fmax parameters) is limited

Engineering Contradiction:
Improvehigh-frequency performanceVSAvoidtransistor structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The transistor base region is segmented into multiple independent base layers (first base layer, second base layer, third base layer) stacked vertically between the emitter and collector. This segmentation allows each base layer to contribute to current handling while maintaining a narrow effective base width for high-frequency operation, thereby improving Ft and Fmax parameters without requiring an excessively complex lateral structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from a conventional lateral base structure to a vertical stacked base structure. By arranging multiple base layers in the vertical dimension rather than extending the base laterally, the design achieves narrow effective base width (improving high-frequency performance) while accommodating multiple bases to enhance current handling capability through the vertical dimension.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If the base width is increased to handle more current, then the current handling capability improves, but the high-frequency performance deteriorates due to increased base transit time

Engineering Contradiction:
Improvecurrent handling capabilityVSAvoidhigh-frequency response
Core Design Contradiction:
Quantity of substanceVSSpeed

Solution Approach 1:

The base region is divided into multiple thin base layers stacked vertically. Each base layer has a small individual width, ensuring short carrier transit time across each layer for high-frequency operation. However, the cumulative effect of multiple bases in series provides increased current handling capability, as each base layer can support current flow while maintaining narrow individual dimensions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The solution moves the base structure into the vertical dimension, stacking multiple narrow base layers between emitter and collector. This vertical arrangement allows the effective base width (lateral dimension) to remain narrow for fast carrier transit, while the vertical stacking of multiple bases increases the total current handling capability by providing multiple parallel current paths through the vertical structure.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The vertical bipolar junction transistor structure boosts high-frequency performance and current handling capabilities, particularly through improved Ft and Fmax parameters, enabling effective operation in high-frequency applications.

Implementation Method 1

achieved through a tiered semiconductor layer arrangement and epitaxial growth processes

Methodology Applied
Scientific EffectEpitaxial growth: Epitaxy

Data Source

PatentUS11749727B2Bipolar junction transistors with duplicated terminals
Publication Date: 2023.09.05 GLOBALFOUNDRIES US INC
  • US11749727B2 patent drawing
  • US11749727B2 patent drawing
  • US11749727B2 patent drawing

AI summary

Structures for a bipolar junction transistor and methods of fabricating a structure for a bipolar junction transistor. The structure includes a first base layer, a second base layer, a first terminal positioned between the first base layer and the second base layer, a second terminal, and a third terminal. The first base layer, the second base layer, and the first terminal are positioned between the second terminal and the third terminal. For example, the first terminal may be positioned in a vertical direction between the first and second base layers.