Vertical Cassette Storage for Semiconductor Processing Footprint Reduction
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Solution Overview
Problem
Conventional substrate processing systems have a large footprint due to the placement of cassette standby blocks adjacent to the processing systems, which increases the overall size and occupancy of the processing apparatus.
Innovation Solution
The cassette standby block, or FEX, is positioned on the uppermost portion of the substrate processing apparatus, allowing for a reduction in footprint by eliminating the need for external space and enabling efficient transfer operations between the FEX and the processing system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the cassette standby block is placed adjacent to the loading/unloading block, then the substrate processing system can efficiently load and unload cassettes, but the overall footprint of the system increases
Solution Approach 1:
The patent applies vertical stacking to move the cassette standby block from the horizontal plane to the vertical dimension. The storage part is positioned above the processing chamber, and the hoist mechanism travels vertically along a guide to transfer cassettes between the storage part and loading/unloading block. This three-dimensional arrangement eliminates the need for adjacent horizontal space while maintaining efficient cassette transfer capabilities.
2Area of stationary object
If the storage part is positioned on the uppermost portion of the apparatus, then the footprint is reduced, but the complexity of the transfer mechanism increases
Solution Approach 1:
The patent introduces a hoist mechanism as an intermediary transfer device that operates vertically between the storage part and loading/unloading block. This hoist acts as a mediator that simplifies the overall transfer system by providing a direct vertical transfer path, eliminating the need for complex horizontal transfer mechanisms that would be required if cassettes were transferred at the same level.
Solution Approach 2:
The patent replaces complex horizontal mechanical transfer systems with a simpler vertical hoist mechanism. The hoist uses a guide and vertical travel path to move cassettes up and down, which is mechanically simpler than implementing horizontal transfer at multiple levels or using complex robotic arms to reach adjacent blocks.
3Area of stationary object
If the cassette standby block is integrated vertically, then the system occupies less space, but installation and retrofitting becomes more difficult
Solution Approach 1:
The patent divides the substrate processing system into distinct modular segments: the processing chamber, the storage part positioned above it, and the hoist mechanism connecting them. This segmentation allows each component to be manufactured and tested independently, and the storage part with hoist can be installed as a separate vertical assembly, facilitating retrofitting of existing systems without requiring complete system redesign.
Data Source
AI summary
There is provided a substrate processing apparatus for processing a substrate, including: a storage part provided on an uppermost portion of the substrate processing apparatus and on which a substrate accommodation container for accommodating the substrate is placed; and a first transfer device configured to directly or indirectly deliver the substrate accommodation container between the storage part and a loading/unloading part, wherein the loading/unloading part is configured to place the substrate accommodation container thereon in the substrate processing apparatus and to load and unload the substrate into and from a processing part of the substrate processing apparatus, and the first transfer device is configured to deliver the substrate accommodation container with respect to an overhead hoist transport that moves above the substrate processing apparatus.