Vertical Electrode MEMS Actuator for Miniaturization
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Solution Overview
Problem
Existing microactuators, particularly micro-mirrors, face challenges in miniaturization and cost reduction while maintaining the ability to generate large forces, as large electrode surfaces are required for capacitive drives, which conflicts with the need for miniaturization.
Innovation Solution
A micro-electromechanical component with an electrically conductive substrate featuring a structured first functional layer with a spring device, a movable first electrode, and a stationary second electrode, allowing for deflection via electrical voltage, along with a production method that includes etching and deposition of dielectric and conductive layers to enable versatile and efficient actuation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If large electrode surfaces are used for capacitive drives, then large forces can be produced, but miniaturization and cost reduction are hindered
Solution Approach 1:
The patent transitions from horizontal electrode arrangements to vertical electrodes extending through the substrate thickness. This dimensional change allows the electrode active surface to utilize the substrate's depth dimension, generating large forces while maintaining a compact planar footprint and enabling miniaturization of the overall component.
Solution Approach 2:
The vertical electrodes are nested within the substrate structure, with the movable electrode device positioned between stationary electrode devices that run vertically through the substrate. This nested arrangement maximizes the electrostatic force-generating surface area within the available volume, resolving the contradiction between force production and miniaturization.
2Volume of moving object
If all components are miniaturized, then usability is increased and costs are reduced, but large electrode surfaces required for capacitive drives cannot be achieved
Solution Approach 1:
By utilizing the vertical dimension through the substrate rather than expanding horizontal electrode surfaces, the invention achieves miniaturized component dimensions while maintaining sufficient electrode active area for effective capacitive actuation, thus resolving the manufacturing constraint.
3Ease of operation
If horizontal electrodes are used on a CMOS chip, then micro-mirrors can be moved, but the structure is less versatile and harder to manufacture
Solution Approach 1:
The patent inverts the conventional horizontal electrode arrangement by using vertical electrodes extending through the substrate. This inversion simplifies the overall structure, enables easier manufacturing through standard semiconductor processes, and provides greater versatility for different actuator configurations while maintaining micro-mirror movement capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows for the production of micro-electromechanical components with movable actuator devices that can be driven or detected via vertical electrode devices, enabling small spacings or large actuator sizes, thus facilitating miniaturization and cost reduction while maintaining functionality.
Implementation Method 1
the actuator device being capable of being deflected through the application of an electrical voltage between the first and the second electrode device
Implementation Method 2
an elastically deflectable actuator device that is suspended via a spring device fashioned in the first functional layer
Data Source
AI summary
A micro-electromechanical component includes: an electrically conductive substrate having an upper side and an underside; a structured electrically conductive first functional layer fashioned on the upper side of the substrate; an elastically deflectable actuator device suspended via a spring device fashioned in the first functional layer; a movable first electrode device extending vertically through the substrate and connected to the actuator device; and a stationary second electrode device extending vertically through the substrate, at a distance from the first electrode device, the actuator device being configured to be deflected through the application of an electrical voltage between the first and the second electrode device.