Vertical Exhaust Pump Layout for Same-Floor Process Furnaces
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Solution Overview
Problem
Conventional processing apparatuses face challenges in maintaining exhaust efficiency when the exhaust apparatus is installed on a different floor from the process furnace, leading to reduced conductance and difficulty in securing a maintenance region due to the layout of the exhaust structure near the process furnace.
Innovation Solution
A configuration is provided where the exhaust apparatus is installed on the same floor as the process furnace, utilizing a vertically elongated pump with horizontal intake and exhaust ports, and a second housing accommodating the pump, allowing for a maintenance region to be secured while maintaining efficient exhaust through a vertically oriented housing and booster pump.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the exhaust apparatus is installed on the same floor as the process furnace, then the maintenance region can be secured and device complexity is reduced, but the exhaust structure occupies space near the process furnace
Solution Approach 1:
The exhaust apparatus is oriented vertically along the Y-axis rather than horizontally, allowing it to be installed on the same floor as the process furnace without occupying excessive horizontal space. The vertically elongated configuration with intake and exhaust ports positioned at different heights enables maintenance access while preserving conductance.
2Productivity
If the exhaust apparatus is installed on a different floor from the process furnace, then many process furnaces can be placed on the same floor, but the conductance becomes small due to the long connection pipe
Solution Approach 1:
The exhaust apparatus uses a vertical orientation along the Y-axis with the process furnace, allowing both to be installed on the same floor. This vertical arrangement significantly shortens the connection pipe length compared to horizontal or multi-floor configurations, thereby maintaining high exhaust conductance while enabling dense floor utilization.
3Reliability
If the exhaust structure is arranged in the vicinity of the process furnace, then the exhaust efficiency is improved, but the maintenance region cannot be secured
Solution Approach 1:
The exhaust apparatus is configured vertically along the Y-axis with the intake port at a lower height and the exhaust port at a higher height. This vertical orientation allows the exhaust structure to be positioned adjacent to the process furnace for efficient exhaust while the vertical clearance and horizontal spacing provide adequate maintenance access from the front and sides.
Solution Approach 2:
The exhaust apparatus has different functional zones: the intake port region near the process furnace for efficient gas capture, and the exhaust port region at higher elevation for discharge. This spatial differentiation allows the exhaust structure to be compact near the furnace while maintaining maintenance access pathways around the vertically elongated housing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances exhaust efficiency and allows for a dedicated maintenance area, reducing operational delays and improving the apparatus's operation rate by integrating the exhaust apparatus on the same floor without compromising conductance.
Implementation Method 1
an intake port configured to suck the gas exhausted from the process chamber
Data Source
AI summary
According to one aspect of the technique, there is provided a processing apparatus including: a pump located on a same floor as an exhaust structure configured to exhaust gas from a process chamber and provided with an intake port through which the gas is sucked, wherein the intake port is provided along a direction in which the gas is exhausted from the process chamber and faces toward a horizontal direction, and a length of the pump is maximum along a vertical direction; and a housing vertically elongated in accordance with the pump.