Vertical Exhaust Switching Layout for Stable Substrate Processing
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Solution Overview
Problem
The existing substrate processing apparatuses face issues with increased pressure loss in exhaust pipes due to longer pipe lengths and increased footprint when the exhaust switching apparatus is disposed in the subfab, leading to variations in processing conditions and results across different processing parts.
Innovation Solution
The apparatus features a multilayer design with exhaust pipes extending upward from processing parts, incorporating flow path switching parts and collecting pipes arranged above, which classify and switch exhaust gases based on fluid type, and includes pressure adjustment and outside air introduction mechanisms to maintain consistent flow rates and pressures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the exhaust switching apparatus is disposed in the subfab, then environmental load is reduced, but the length of exhaust pipe increases and pressure loss increases
Solution Approach 1:
The exhaust pipes extend vertically upward from the processing parts into a three-dimensional space above the processing chamber, rather than horizontally to a separate exhaust switching apparatus. This vertical arrangement in the up-and-down direction reduces horizontal footprint while maintaining exhaust functionality, and the collecting pipes are positioned at different heights to collect exhaust from multiple processing parts.
Solution Approach 2:
The exhaust pipes are nested within the processing chamber structure, extending upward through or alongside the processing parts. The collecting pipes are arranged above the processing parts in a compact configuration, creating a nested spatial arrangement that reduces overall apparatus footprint while maintaining functional separation of exhaust paths.
2Loss of energy
If the exhaust switching apparatus is disposed at the side of the processing part, then the length of exhaust pipe is reduced, but the footprint of the substrate processing apparatus increases
Solution Approach 1:
The exhaust switching function is achieved by moving the collecting pipes vertically above the processing parts rather than horizontally beside them. The flow path switching parts are positioned at the upper ends of exhaust pipes in the vertical dimension, allowing exhaust switching without increasing horizontal footprint. This utilizes the up-and-down direction to achieve exhaust switching functionality in a compact horizontal space.
Solution Approach 2:
The exhaust switching apparatus functionality is merged with the exhaust pipe structure itself. The flow path switching parts are integrated at the upper ends of the exhaust pipes, combining the exhaust collection and switching functions into a single compact vertical arrangement rather than separate horizontal components.
3Area of stationary object
If multiple processing parts are arrayed in up-and-down direction, then footprint is reduced, but pressure loss varies across processing parts
Solution Approach 1:
Each exhaust pipe is equipped with an individual flow path switching part at its upper end, allowing independent control and optimization of exhaust flow paths for each processing part. The collecting pipes are positioned at different heights corresponding to different processing parts, creating localized exhaust collection zones that maintain consistent pressure conditions for each processing chamber regardless of vertical position.
Solution Approach 2:
The flow path switching parts enable dynamic adjustment of exhaust flow parameters for each processing part independently. By controlling which collecting pipe receives exhaust from each processing part, the system can optimize pressure and flow rate parameters for each chamber, maintaining consistent processing conditions across all processing parts despite their vertical arrangement.
Data Source
AI summary
In a substrate processing apparatus (1), above a plurality of processing parts (31) arrayed in an up-and-down direction, arranged are a plurality of collecting pipes (61a to 61c). The plurality of collecting pipes (61a to 61c) correspond to a plurality of fluid classifications, respectively. Further, provided are a plurality of exhaust pipes (4) extending upward from the plurality of processing parts (31), into which exhaust gases from the processing parts (31) flow, respectively. At an upper end portion of each of the exhaust pipes (4), provided is a flow path switching part (5) which connects the upper end portion to the plurality of collecting pipes (61a to 61c) and switches a flow path of the exhaust gas flowing in the exhaust pipe (4) among the plurality of collecting pipes (61a to 61c).