Vertical Fixing Transmission Box for Reticle Pod Handling

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Solution Overview

Problem

The manual handling of reticle pods in semiconductor manufacturing poses safety risks and contamination risks due to the increasing size and weight of silicon wafers, leading to potential drops and quality degradation.

Innovation Solution

A vertical fixing transmission box equipped with an elastic component and an overhead lifting system that automatically secures and transports reticle pods using an automatic material handling system, ensuring safe and contamination-free transfer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual handling of reticle pods is used, then operators can directly control the transmission process, but safety risks increase and contamination may occur due to the weight and size of the reticle pod

Engineering Contradiction:

Improvemanual controlVSAvoidsafety

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

An automatic transmission device is introduced as an intermediary between the operator and the reticle pod. The device includes a transmission box with a carrier substrate that holds the reticle pod, and a mechanical arm that automatically picks up and transports the box, eliminating direct manual handling of the heavy pod while maintaining operational control

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The system is divided into separate functional components: a transmission box for containing the reticle pod, a carrier substrate for holding the box, and a mechanical arm for transportation. This segmentation allows the heavy pod to be isolated in a contained unit that can be safely manipulated by automated equipment rather than handled directly by operators

Inventive Principle:

Principle #1Segmentation

2Device complexity

If the reticle pod is transmitted manually, then the transmission process is simple, but the risk of dropping the pod and causing damage increases

Engineering Contradiction:

Improvetransmission systemVSAvoidpod safety

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The transmission box is designed with cushioning structures including elastic components and buffer zones within the box body. These elements are pre-positioned to absorb shocks and prevent damage if the pod experiences sudden movements or drops during automated transmission, providing protective cushioning before damage can occur

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

3Ease of operation

If manual transmission of reticle pods is used, then operational flexibility is maintained, but clean room construction and maintenance costs increase due to manual operation errors

Engineering Contradiction:

Improveoperational flexibilityVSAvoidproduction yield

Core Design Contradiction:

Ease of operationVSProductivity

Solution Approach 1:

The automatic transmission device performs the transmission function autonomously without requiring manual intervention. The mechanical arm automatically picks up the transmission box, navigates to the destination, and places it, allowing the system to serve itself and eliminating errors caused by human operation while maintaining flexibility through programmable control

Inventive Principle:

Principle #25Self-service

4Volume of moving object

If the reticle pod size increases with larger silicon wafers, then the capacity to handle larger wafers is improved, but the weight increases making manual handling unsafe

Engineering Contradiction:

Improvereticle pod capacityVSAvoidreticle pod weight

Core Design Contradiction:

Volume of moving objectVSWeight of moving object

Solution Approach 1:

The mechanical arm transmission system provides counterbalancing support for the heavy reticle pod during transportation. The automated handling mechanism is designed to compensate for the pod's weight, allowing large-capacity pods to be moved safely without requiring operators to physically support the full weight, thus enabling increased capacity while maintaining safety

Inventive Principle:

Principle #8Anti-weight (Counterweight)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides a safe and efficient method for transferring reticle pods, reducing manual handling errors and maintaining cleanliness, thereby enhancing production yield and reducing costs associated with clean room maintenance.

Implementation Method 1

the elastic component is released and provides a vertical elastic force in the fixing state... the elastic component provides the vertical elastic force to abut against the container downwardly and fix the container

Methodology Applied

Scientific EffectElastic force: Elasticity

Data Source

PatentUS10103045B2Vertical fixing transmission box and transmission method using the same

Publication Date: 2018.10.16 GUDENG PRECISION IND CO LTD

AI summary

A vertical fixing transmission box used for transmitting a container is disclosed. The transmission box includes a carrier substrate and an elastic component, wherein the carrier substrate is utilized to carry the container, and the elastic component may be switched between an opening state and a fixing state. When the container is carried by the carrier substrate and the elastic component is switched to the opening state, the elastic component provides a vertical elastic force to abut against the container downwardly and fix the container. Also, the transmission box may be transported by an automatic material handling system.