Vertical Glass Substrate Carrier with Upper Fixation
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Solution Overview
Problem
The increasing size and thinning of glass substrates during processing lead to bulging and a higher likelihood of breakage, posing challenges in handling and processing without sacrificing throughput.
Innovation Solution
A carrier system that supports large area substrates in a vertically oriented position, utilizing upper fixation elements to carry at least 60% of the substrate's weight, reducing bulging and the risk of breakage by distributing gravity forces across the upper edge, and incorporating additional side or bottom fixation elements to prevent horizontal movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of moving object
If glass substrates are made larger and thinner to increase processing area and reduce material usage, then substrate area increases and material consumption decreases, but substrate strength decreases and likelihood of breakage increases
Solution Approach 1:
The patent transitions from horizontal substrate support to vertical orientation, changing the dimensional arrangement of the substrate in the processing chamber. This vertical positioning allows gravity to act along the length of the substrate rather than causing bending stresses across its surface, thereby maintaining substrate strength while accommodating larger areas and thinner profiles.
Solution Approach 2:
The patent uses a carrier as an intermediary structure that replicates the support function traditionally provided by horizontal mounting. The carrier with its fixation elements creates a replicated support system that distributes forces appropriately, enabling the handling of larger, thinner substrates without direct contact that would cause breakage.
2Ease of operation
If substrates are supported horizontally on carriers, then handling and processing is simplified, but bulging occurs and glass breakage likelihood increases
Solution Approach 1:
The patent inverts the traditional horizontal support approach by positioning substrates vertically. This inversion changes the direction of gravitational force relative to the substrate, allowing the weight to be supported along the length rather than causing bulging across the surface. The fixation elements are positioned to engage the substrate in a manner that prevents both bulging and breakage while maintaining ease of handling through the carrier system.
3Reliability
If carrier complexity is increased to provide better support and reduce breakage, then substrate reliability improves, but device complexity increases
Solution Approach 1:
The patent divides the carrier into multiple functional segments: a support structure for vertical positioning, fixation elements for securing the substrate, and positioning features for precise alignment. This segmentation allows each component to be optimized for its specific function, improving overall reliability while keeping individual components relatively simple and manageable.
Data Source
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AI summary
A carrier for supporting a large area glass substrate having an area of at least 0.174 m² in a substrate processing chamber is described. The carrier includes at least one fixation element configured to hold the substrate at the substrate's upper side and configured to carry at least 60% of the substrate's weight during processing of the substrate, and at least one support portion adapted to hold the substrate at an essentially vertical orientation during processing of the substrate.