Vertical Grating Structures for Waveguide Optical Isolation

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Solution Overview

Problem

Waveguide cores in photonics chips suffer from significant leakage loss of propagating light to the substrate, degrading performance due to inadequate optical isolation.

Innovation Solution

A grating structure is introduced between the waveguide core and the substrate, comprising alternating layers of materials with different refractive indices to enhance optical isolation and reduce mode leakage, formed by wafer-bonding processes or sequential deposition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a waveguide core is placed directly on a substrate, then device complexity is reduced, but light leakage loss increases significantly

Engineering Contradiction:
Improvestructure complexityVSAvoidlight leakage loss
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

A grating structure is introduced as an intermediary element between the waveguide core and the substrate. This grating acts as a mediator that provides optical isolation, preventing light leakage from the waveguide core into the substrate while maintaining structural simplicity. The grating includes alternating layers of materials with different refractive indices, creating an optical barrier that resolves the contradiction between structural simplicity and light leakage prevention.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The grating structure comprises composite materials with alternating high and low refractive index layers. This composite material approach creates an optical barrier that effectively reduces light leakage while maintaining a relatively simple overall device structure. The alternating layers of materials with different optical properties form a sophisticated optical isolation mechanism without significantly increasing structural complexity.

Inventive Principle:
Principle #40Composite materials

2Loss of energy

If optical isolation is improved by adding isolation structures, then light leakage is reduced, but device complexity increases

Engineering Contradiction:
Improvelight leakage lossVSAvoidstructure complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The grating structure serves as an intermediary that provides effective optical isolation with minimal impact on overall device complexity. By positioning the grating between the waveguide core and substrate, it achieves light leakage reduction without requiring complex reconfiguration of the waveguide or substrate structures.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The isolation function is segmented into a dedicated grating structure with multiple alternating layers. This segmentation allows the optical isolation function to be implemented independently as a discrete component, simplifying the overall device architecture while effectively addressing light leakage issues.

Inventive Principle:
Principle #1Segmentation

3Loss of energy

If the grating uses alternating layers of materials with different refractive indices, then optical isolation is enhanced, but manufacturing complexity increases

Engineering Contradiction:
Improvelight leakage lossVSAvoidfabrication complexity
Core Design Contradiction:
Loss of energyVSEase of manufacture

Solution Approach 1:

The grating utilizes composite materials with alternating high and low refractive index layers to enhance optical isolation. This composite structure is designed to be compatible with standard semiconductor fabrication processes, including wafer bonding and sequential deposition, thereby achieving effective light leakage reduction while maintaining ease of manufacture.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The grating structure exploits parameter changes in material refractive indices to achieve optical isolation. By selecting materials with contrasting refractive indices and controlling layer thicknesses, the design achieves enhanced light leakage reduction using established fabrication techniques, balancing optical performance with manufacturing feasibility.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The grating structure effectively reduces light leakage to the substrate, improves performance by minimizing self-heating and allowing for electrical back biasing, while also enabling tailored mode size and sidelobe suppression.

Implementation Method 1

The grating includes a first plurality of layers and a second plurality of layers that alternate in the vertical direction with the first plurality of layers. The first plurality of layers comprise a first material having a first refractive index, and the second plurality of layers comprise a second material having a second refractive index that is greater than the first refractive index.

Methodology Applied
Scientific EffectOptical interference: Interference

Implementation Method 2

The first plurality of layers comprise a first material having a first refractive index, and the second plurality of layers comprise a second material having a second refractive index that is greater than the first refractive index.

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS11841534B1Vertical grating structures placed between a waveguide core and a substrate
Publication Date: 2023.12.12 GLOBALFOUNDRIES US INC
  • US11841534B1 patent drawing
  • US11841534B1 patent drawing

AI summary

Structures including a waveguide core and methods of fabricating a structure including a waveguide core. The structure comprises a substrate, a waveguide core, and a grating disposed in a vertical direction between the waveguide core and the substrate. The grating includes a first plurality of layers and a second plurality of layers that alternate in the vertical direction with the first plurality of layers. The first plurality of layers comprise a first material having a first refractive index, and the second plurality of layers comprise a second material having a second refractive index that is greater than the first refractive index.