Vertical Guide Cup Arrangement for Liquid Recovery in Substrate Processing
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Solution Overview
Problem
Existing substrate liquid processing apparatuses face challenges in preventing liquefied liquid from reverting back to mist due to air streams generated by rotating members, leading to inefficiencies in liquid recovery.
Innovation Solution
A substrate liquid processing apparatus featuring a configuration with guide cups and position adjustment mechanisms that guide and recover process-liquids, including a guide member to direct liquids to recovery tanks, and an exhaust system to manage air streams, preventing mist formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single cup structure is used to recover process liquid, then the device complexity is reduced, but the liquid recovery efficiency deteriorates because liquid easily changes back to mist due to air streams
Solution Approach 1:
The single cup structure is divided into multiple cup structures (first cup structure and second cup structure) arranged in the vertical direction. Each cup structure has its own opening that can be positioned to face the peripheral edge of the substrate. This segmentation allows different cup structures to recover different types of process liquid (chemical liquid and rinse liquid) separately, preventing mixed liquid from re-evaporating into mist and improving overall liquid recovery efficiency.
Solution Approach 2:
The patent transitions from a horizontal arrangement of recovery cups to a vertical arrangement in the vertical direction. The first and second cup structures are positioned at different heights, with their openings capable of facing the substrate's peripheral edge from different vertical positions. This dimensional change allows for better separation of liquid recovery paths and reduces the impact of air streams causing liquid to revert to mist.
2Productivity
If multiple cup structures are used to recover different process liquids, then the liquid recovery efficiency is improved, but the device complexity increases
Solution Approach 1:
The cup structures are made movable relative to the substrate holding table through position adjustment mechanisms. The openings of the first and second cup structures can be independently adjusted to face the peripheral edge of the substrate at appropriate positions. This dynamic adjustment capability allows the system to adapt to different process requirements while maintaining a relatively simple overall structure, balancing complexity with improved liquid recovery efficiency.
3Productivity
If the cup opening is positioned to face the substrate peripheral edge, then the liquid recovery is improved, but the liquid may be exposed to air streams from rotating members causing re-evaporation
Solution Approach 1:
The patent positions multiple cup structures in the vertical direction rather than horizontally. The first cup structure is positioned at a higher vertical level while the second cup structure is positioned at a lower vertical level. This vertical arrangement allows the cup openings to face the substrate peripheral edge from different heights, enabling liquid recovery while minimizing exposure to horizontal air streams generated by rotating members. The vertical positioning creates a more favorable geometry for preventing re-evaporation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively suppresses the re-evaporation of liquefied liquids into mist, enhancing the recovery efficiency of process-liquids and maintaining a stable processing environment.
Implementation Method 1
first and second guide cups which are provided around the substrate holding table and are disposed in this order from the top, the first and second guide cups being configured to respectively guide downward the process-liquid scattering from the rotating substrate
Implementation Method 2
an exhaust system to manage air streams, preventing mist formation
Data Source
AI summary
A substrate liquid processing apparatus of the present invention includes a process-liquid supply unit selectively supplying a plurality of types of process-liquids to the substrate held by a substrate holding table, first and second guide cups which are disposed in this order from the top and are configured to respectively guide downward the process-liquid scattering from the rotating substrate while being held by the substrate holding table; and a position adjustment mechanism adjusting a positional relationship between the first and second guide cups and the substrate holding table. A first process-liquid recovery tank is provided at a lower area of the first and second guide cups and recovers the process-liquid guided by the first guide cup. A second process-liquid recovery tank is provided at the inner peripheral side of the first process-liquid recovery tank and recovers the process-liquid guided by the second guide cup.