Vertical Heat Processing Apparatus Boat Turnover Prevention
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Solution Overview
Problem
Conventional vertical heat processing apparatuses face challenges in preventing boat turnover during earthquakes, especially when using the two-boat system, due to limitations in structural design and hardware/software restrictions, which can result in damage to expensive wafers and equipment.
Innovation Solution
A vertical heat processing apparatus with a simple structure that includes a holder table with a gripping mechanism, such as rollers that can move and position to engage with the substrate holder's annular bottom plate, to securely grip and prevent turnover during external forces like earthquakes, while allowing for efficient two-boat system operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a substrate-holder securing member is used to securely connect the boat to the heat retention tube, then the boat turnover is prevented, but the device complexity increases and the two-boat system cannot be implemented
Solution Approach 1:
The securing mechanism is divided into two separate locations: (1) a securing member on the heat retention tube that engages with the boat during heat processing, and (2) a gripping mechanism on the holder table that secures the boat during wafer transfer. This segmentation allows the two-boat system to operate while maintaining turnover prevention capabilities at both critical locations.
Solution Approach 2:
The holder table with gripping mechanism acts as an intermediary securing point between the boat and the heat retention tube. During wafer transfer operations, the holder table temporarily supports and secures the boat, eliminating the need for a complex all-in-one securing system while maintaining reliability.
2Object-affected harmful factors
If the holder table is provided with a gripping mechanism to prevent boat turnover, then earthquake resistance is improved, but the device complexity increases
Solution Approach 1:
The gripping mechanism is implemented locally at the holder table where the boat is temporarily positioned during wafer transfer, rather than throughout the entire system. This localized approach provides earthquake resistance at the critical vulnerability point while minimizing overall device complexity.
Solution Approach 2:
The gripping mechanism on the holder table provides preliminary anti-action by securing the boat before external forces (earthquake) can cause turnover. The mechanism is positioned to preemptively counteract potential harmful effects during the vulnerable transfer operation phase.
Data Source
AI summary
The present invention is a vertical heat processing apparatus comprising: a heat processing furnace having a furnace opening; a lid member for closing the furnace opening of the heat processing furnace; a first substrate holder and a second substrate holder, each of which is capable of holding a plurality of substrates in a tier-like manner and of being alternately placed on the lid member through a heat retention tube; an elevating mechanism that vertically moves the lid member to load one of the substrate holders into the heat processing furnace, and to unload the one of the substrate holders from the heat processing furnace; a holder table configured to be placed thereon the other of the substrate holders for transfer of the substrates, when the one of the substrate holders is in the heat processing furnace; and a holder conveying mechanism configured to convey the respective substrate holders between the holder table and the heat retention tube; wherein the holder table is provided with a holder gripping mechanism for gripping the substrate holder to prevent turnover thereof.