Vertical Indexer Mechanism for Substrate Transport Efficiency
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Solution Overview
Problem
Current substrate treating apparatuses face inefficiencies due to standby states in substrate transportation mechanisms, which can lead to decreased throughput and increased substrate handling times, especially when additional openers are added to reduce standby time but result in reduced efficiency in transporting substrates.
Innovation Solution
The apparatus features a configuration with multiple carrier platforms arranged vertically, where substrate transportation mechanisms use lifting, lowering, and rotating hands to transport substrates between carrier platforms, allowing for continuous operation without lateral sliding, thus reducing standby time and maintaining efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If two openers are added horizontally to reduce standby state, then throughput is improved, but substrate transportation efficiency deteriorates due to required lateral sliding movement
Solution Approach 1:
The patent transitions from horizontal arrangement of openers to vertical arrangement. The first and second opener lines are disposed in the upward/downward direction rather than horizontally adjacent, allowing the substrate transportation mechanism to operate vertically without lateral sliding, thus resolving the contradiction between increasing throughput and maintaining transportation efficiency
Solution Approach 2:
The substrate transportation mechanism is designed with dynamic capabilities to move between different vertical positions and orientations. The mechanism can rotate and reposition itself to serve multiple openers in the vertical direction, enabling continuous operation without standby states while maintaining efficient substrate transport paths
2Loss of time
If substrate transportation mechanism is made stationary in horizontal position, then transportation efficiency is maintained, but ability to serve multiple openers deteriorates
Solution Approach 1:
The substrate transportation mechanism is designed as a universal system that can serve multiple openers (first and second opener lines with multiple carriers each) without requiring horizontal repositioning. Through vertical and rotational movements, a single mechanism performs the function of serving what would traditionally require multiple horizontal mechanisms, achieving both efficiency and versatility
Data Source
AI summary
Each of first and second substrate transportation mechanisms transports a substrate for a FOUP placed not on, for example, each of two openers disposed laterally but on, for example, each of two openers disposed in an upward/downward direction. Thus, even if the number of openers increases, the substrate is transported not by sliding a hand capable of moving forward and backward, but by lifting, lowering, and rotating the hand. Thus, transportation of the substrate can be simplified. Accordingly, standby time of substrate transportation can be reduced, and a decrease in substrate transportation efficiency can be prevented.