Vertical Laminated Magnetic Core for High-Inductance CMOS Inductors

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Solution Overview

Problem

Current technologies lack practical, high-efficiency inductors capable of carrying large current levels with high inductance, low resistance, and high frequency response, which are essential for advanced power conversion in compact semiconductor devices, particularly for CMOS integration, where energy efficiency and reduced heat generation are critical.

Innovation Solution

A method for manufacturing a vertically-laminated ferromagnetic core by depositing a conductive seed layer, forming a pattern, and etching a substrate to expose portions for ferromagnetic material deposition, creating vertically-oriented layers with controlled magnetization axes, and forming a conductive coil around the core to enhance inductance and reduce power loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional planar inductor structures are used, then manufacturing is simpler, but inductance per unit area is insufficient to achieve high current carrying capacity in compact devices

Engineering Contradiction:
Improveinductance per unit areaVSAvoidcore structure complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent transitions from conventional planar (2D) inductor structures to a vertically-laminated (3D) core structure. The magnetic core comprises multiple ferromagnetic layers stacked vertically with alternating magnetization directions, creating a three-dimensional magnetic path that significantly increases inductance per unit area. This dimensional change allows the inductor to achieve high current carrying capacity while maintaining a compact footprint suitable for integrated power conversion devices.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If high permeability ferromagnetic material is used, then inductance increases, but coercivity causes hysteresis losses and reduced efficiency

Engineering Contradiction:
ImproveinductanceVSAvoidhysteresis loss
Core Design Contradiction:
ProductivityVSLoss of energy

Solution Approach 1:

The patent divides the magnetic core into multiple thin ferromagnetic layers separated by non-magnetic spacer layers. Each layer is independently magnetized in alternating directions (upward and downward), creating a segmented magnetic structure. This segmentation reduces hysteresis losses by minimizing eddy currents within each thin layer while maintaining high overall inductance through the cumulative effect of all layers working together in the magnetic circuit.

Inventive Principle:
Principle #1Segmentation

3Productivity

If larger inductor area is used, then current carrying capacity increases, but device footprint becomes too large for CMOS integration

Engineering Contradiction:
Improvecurrent carrying capacityVSAvoidinductor footprint
Core Design Contradiction:
ProductivityVSArea of stationary object

Solution Approach 1:

The patent achieves high current carrying capacity without increasing footprint by utilizing vertical stacking of multiple ferromagnetic layers. The alternating magnetization pattern in the vertical dimension creates efficient magnetic flux paths that maximize inductance within a small planar area. This allows the inductor to handle large currents while maintaining a compact footprint suitable for integration with CMOS transistors in three-dimensional or 2.5D chip stacking configurations.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

4Speed

If high frequency operation is required, then power conversion efficiency improves, but conventional inductors exhibit inductance decrease and increased losses at high frequencies

Engineering Contradiction:
Improvefrequency responseVSAvoidpower loss
Core Design Contradiction:
SpeedVSLoss of energy

Solution Approach 1:

The patent employs thin segmented ferromagnetic layers separated by non-magnetic spacers, which effectively reduces eddy current losses at high frequencies. The segmentation creates multiple small magnetic paths instead of large continuous loops, minimizing circulating currents that cause frequency-dependent losses. This structure maintains stable inductance values and low power losses even at high operating frequencies, enabling efficient high-speed power conversion in integrated devices.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the creation of high-efficiency inductors that can handle large currents with minimal power loss and heat generation, suitable for integrated power conversion in compact semiconductor devices, improving energy efficiency and reducing output voltage ripple.

Implementation Method 1

depositing a ferromagnetic material onto the exposed portions of the conductive seed layer to form vertically-oriented ferromagnetic layers

Methodology Applied
Scientific EffectElectrodeposition: Electrodeposition

Implementation Method 2

forming a conductive coil around the core to enhance inductance

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 3

Coercivity is the measure of hysteresis observed in the relationship between applied magnetic field and magnetization

Methodology Applied
Scientific EffectHysteresis: Hysteresis

Implementation Method 4

high frequency response whereby there is little or no inductance decrease for alternating current (AC) input signal up to 10 MHz

Methodology Applied
Scientific EffectEddy currents: Eddy Currents

Data Source

PatentUS11735349B2Magnetic core with vertical laminations having high aspect ratio
Publication Date: 2023.08.22 FERRIC INC
  • US11735349B2 patent drawing
  • US11735349B2 patent drawing
  • US11735349B2 patent drawing

AI summary

A method for manufacturing a vertically-laminated ferromagnetic core includes (a) depositing a conductive seed layer on or over a first side of a substrate; (b) depositing a masking layer on or over a second side of the substrate, the first and second sides on opposite sides of the substrate; (c) forming a pattern in the masking layer; (d) dry etching the substrate, based on the pattern in the masking layer, from the second side to the first side to expose portions of the conductive seed layer; and (e) depositing a ferromagnetic material onto the exposed portions of the conductive seed layer to form vertically-oriented ferromagnetic layers.