Vertical Laminated Magnetic Core for High-Inductance CMOS Inductors
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Solution Overview
Problem
Current technologies lack practical, high-efficiency inductors capable of carrying large current levels with high inductance, low resistance, and high frequency response, which are essential for advanced power conversion in compact semiconductor devices, particularly for CMOS integration, where energy efficiency and reduced heat generation are critical.
Innovation Solution
A method for manufacturing a vertically-laminated ferromagnetic core by depositing a conductive seed layer, forming a pattern, and etching a substrate to expose portions for ferromagnetic material deposition, creating vertically-oriented layers with controlled magnetization axes, and forming a conductive coil around the core to enhance inductance and reduce power loss.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional planar inductor structures are used, then manufacturing is simpler, but inductance per unit area is insufficient to achieve high current carrying capacity in compact devices
Solution Approach 1:
The patent transitions from conventional planar (2D) inductor structures to a vertically-laminated (3D) core structure. The magnetic core comprises multiple ferromagnetic layers stacked vertically with alternating magnetization directions, creating a three-dimensional magnetic path that significantly increases inductance per unit area. This dimensional change allows the inductor to achieve high current carrying capacity while maintaining a compact footprint suitable for integrated power conversion devices.
2Productivity
If high permeability ferromagnetic material is used, then inductance increases, but coercivity causes hysteresis losses and reduced efficiency
Solution Approach 1:
The patent divides the magnetic core into multiple thin ferromagnetic layers separated by non-magnetic spacer layers. Each layer is independently magnetized in alternating directions (upward and downward), creating a segmented magnetic structure. This segmentation reduces hysteresis losses by minimizing eddy currents within each thin layer while maintaining high overall inductance through the cumulative effect of all layers working together in the magnetic circuit.
3Productivity
If larger inductor area is used, then current carrying capacity increases, but device footprint becomes too large for CMOS integration
Solution Approach 1:
The patent achieves high current carrying capacity without increasing footprint by utilizing vertical stacking of multiple ferromagnetic layers. The alternating magnetization pattern in the vertical dimension creates efficient magnetic flux paths that maximize inductance within a small planar area. This allows the inductor to handle large currents while maintaining a compact footprint suitable for integration with CMOS transistors in three-dimensional or 2.5D chip stacking configurations.
4Speed
If high frequency operation is required, then power conversion efficiency improves, but conventional inductors exhibit inductance decrease and increased losses at high frequencies
Solution Approach 1:
The patent employs thin segmented ferromagnetic layers separated by non-magnetic spacers, which effectively reduces eddy current losses at high frequencies. The segmentation creates multiple small magnetic paths instead of large continuous loops, minimizing circulating currents that cause frequency-dependent losses. This structure maintains stable inductance values and low power losses even at high operating frequencies, enabling efficient high-speed power conversion in integrated devices.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the creation of high-efficiency inductors that can handle large currents with minimal power loss and heat generation, suitable for integrated power conversion in compact semiconductor devices, improving energy efficiency and reducing output voltage ripple.
Implementation Method 1
depositing a ferromagnetic material onto the exposed portions of the conductive seed layer to form vertically-oriented ferromagnetic layers
Implementation Method 2
forming a conductive coil around the core to enhance inductance
Implementation Method 3
Coercivity is the measure of hysteresis observed in the relationship between applied magnetic field and magnetization
Implementation Method 4
high frequency response whereby there is little or no inductance decrease for alternating current (AC) input signal up to 10 MHz
Data Source
AI summary
A method for manufacturing a vertically-laminated ferromagnetic core includes (a) depositing a conductive seed layer on or over a first side of a substrate; (b) depositing a masking layer on or over a second side of the substrate, the first and second sides on opposite sides of the substrate; (c) forming a pattern in the masking layer; (d) dry etching the substrate, based on the pattern in the masking layer, from the second side to the first side to expose portions of the conductive seed layer; and (e) depositing a ferromagnetic material onto the exposed portions of the conductive seed layer to form vertically-oriented ferromagnetic layers.


