Vertical Laminated Magnetic Core Inductor for CMOS Integration
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Solution Overview
Problem
Current technologies lack practical inductors with high inductance, low resistance, high current rating, and high frequency response, which are necessary for efficient switched-inductor power conversion in compact and dense microelectronic devices, particularly in CMOS integration, where energy efficiency and low inductor current ripple are critical.
Innovation Solution
A magnetic core structure comprising ferromagnetic layers with specific magnetization axes and insulator layers, along with an inductor coil configured to generate a magnetic field parallel to the hard axis of magnetization, is developed to enhance inductance and reduce power loss, using electrodeposition and oxidation processes to achieve the desired properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If conventional inductor designs are used, then device area is reduced, but inductance, resistance, current rating, and frequency response performance deteriorate
Solution Approach 1:
The magnetic core is divided into multiple ferromagnetic layers separated by insulator layers, creating a laminated structure. This segmentation reduces eddy current losses while maintaining high inductance and allows the inductor to achieve high current rating and frequency response in a compact area
Solution Approach 2:
The patent transitions from planar inductor designs to three-dimensional vertically-laminated core structures. By stacking ferromagnetic layers vertically with insulator layers in between, the design achieves high inductance and performance metrics while maintaining a small footprint area suitable for CMOS integration
2Reliability
If high permeability materials are used, then inductance increases, but power loss increases
Solution Approach 1:
The magnetic core is segmented into multiple thin ferromagnetic layers separated by insulator layers. This lamination structure reduces eddy current losses in high permeability materials while maintaining high inductance, thereby reducing power loss (Ploss=I2R) without sacrificing inductance performance
Solution Approach 2:
Insulator layers are introduced as intermediary elements between adjacent ferromagnetic layers. These insulator layers block eddy current paths while allowing magnetic flux to pass through, reducing power loss while maintaining high inductance from the high permeability ferromagnetic materials
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables the creation of high-quality inductors with improved energy efficiency and reduced power consumption, suitable for integrated power conversion in compact microelectronic devices, addressing the limitations of existing inductor technologies.
Implementation Method 1
an inductor coil wrapped around the core, the inductor coil extending in a direction parallel to the core plane, the inductor coil configured to generate a first magnetic field parallel to said hard axis of magnetization
Implementation Method 2
each said ferromagnetic layer having a permanent easy axis of magnetization parallel to said first axis and a permanent hard axis of magnetization parallel to a second axis
Implementation Method 3
each said ferromagnetic layer having a permanent easy axis of magnetization parallel to said first axis and a permanent hard axis of magnetization parallel to a second axis
Implementation Method 4
a plurality of insulator layers disposed on said planar surface, each said insulation layer disposed between adjacent ferromagnetic layers
Data Source
AI summary
An inductor includes a magnetic core lying in a core plane. The magnetic core includes a vertical laminated structure with respect to the core plane of alternating ferromagnetic vertical layers and insulator vertical layers. An easy axis of magnetization can be permanently or semi-permanently fixed in the ferromagnetic vertical layers along an axis orthogonal to the core plane. Methods of manufacturing same are also disclosed.