Vertical Loadlock Chamber Layout for Faster Substrate Transfer
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Solution Overview
Problem
There is a need for a substrate processing apparatus with high productivity and a small footprint, as existing systems face challenges in efficiently managing substrate transfer and pressure adjustments within a compact and clean environment.
Innovation Solution
The proposed solution involves a loadlock apparatus with a unique design featuring a loadlock chamber with two accommodation spaces, each with a slit valve system that allows for vertical movement and independent pressure control. This design enables efficient substrate transfer and pressure management within a compact footprint.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the loadlock chamber uses a single accommodation space with conventional valve configuration, then the apparatus structure is simple, but the productivity is limited due to sequential loading/unloading operations
Solution Approach 1:
The loadlock chamber is segmented into multiple accommodation spaces (first and second accommodation spaces) stacked vertically. Each space can independently accommodate substrates and perform pressure adjustment, allowing parallel processing operations that increase throughput without proportionally increasing the apparatus footprint.
Solution Approach 2:
The patent transitions from a horizontal arrangement of accommodation spaces to a vertical stacking configuration. The first and second accommodation spaces are arranged in the vertical direction, enabling simultaneous loading and unloading operations through openings at different heights, thereby improving productivity while maintaining a compact footprint.
2Productivity
If the valve plates move horizontally to open/close openings, then the valve mechanism is simple, but the substrate handling efficiency is reduced due to longer opening/closing times
Solution Approach 1:
Instead of moving valve plates horizontally to open/close the openings, the patent inverts the motion direction to vertical movement. The first valve plate moves vertically to open/close the first opening, and the second valve plate moves vertically to open/close the second opening. This vertical motion reduces the travel distance and enables faster opening/closing operations, improving substrate handling efficiency.
3Productivity
If the apparatus expands horizontally to accommodate multiple loading/unloading ports, then the substrate handling capacity increases, but the footprint of the apparatus increases
Solution Approach 1:
The patent resolves the footprint issue by stacking accommodation spaces vertically rather than arranging them horizontally. The first and second accommodation spaces are positioned at different heights within the loadlock chamber, allowing multiple substrate handling operations to occur simultaneously without increasing the horizontal footprint of the apparatus.
Solution Approach 2:
Multiple accommodation spaces are nested within the single loadlock chamber structure. The first and second accommodation spaces are integrated into the same chamber body, sharing common structural elements and support systems, which maximizes the use of vertical space while maintaining a compact overall apparatus size.
Data Source
AI summary
A loadlock apparatus includes a loadlock chamber including a first opening and a second opening separated in a vertical direction; a first slit valve including a first valve plate configured to move between a first open position where the first opening is open and a first closed position where the first opening is closed, the first open position being a position moved downward from the first closed position; and a second slit valve including a second valve plate configured to move between a second open position where the second opening is open and a second closed position where the second opening is closed, the second open position being a position moved upward from the second closed position.