Vertical Mask Frame Actuation for OLED Deposition Alignment
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Solution Overview
Problem
In deposition processes, particularly for OLED manufacturing, mask arrangements in vertical orientations are prone to deformation due to gravity, leading to reduced quality and alignment of deposited layers.
Innovation Solution
A mask arrangement with a frame supported by actuators that apply forces opposite to gravity, compensating for the deformation and maintaining alignment, comprising a mask frame with frame elements and actuators that can push or pull to counteract gravitational forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the mask arrangement is vertically oriented to reduce apparatus footprint, then space utilization is improved, but the mask arrangement deforms due to gravity
Solution Approach 1:
The patent applies actuators that generate counteracting forces to compensate for gravitational deformation of the mask arrangement in vertical orientation. The actuators apply forces in opposite directions to frame elements, creating a balancing effect that prevents gravity-induced deformation while maintaining the space-saving vertical configuration.
Solution Approach 2:
The patent introduces actively controllable actuators that can dynamically adjust forces applied to the mask frame elements. This dynamic control system allows real-time compensation for gravitational effects, enabling the mask arrangement to maintain its shape despite being in a vertical orientation where gravity constantly acts upon it.
2Area of stationary object
If the mask arrangement is vertically oriented, then space efficiency is improved, but alignment precision of deposited layers deteriorates
Solution Approach 1:
By applying counteracting forces through actuators to balance gravitational effects, the mask arrangement maintains its intended geometry and alignment. This prevents gravity-induced misalignment that would otherwise occur in vertical orientation, thereby preserving the precision of deposited layer alignment while keeping the apparatus footprint small.
Solution Approach 2:
The system employs sensors to detect the position and alignment of the mask arrangement, feeding this information back to the control system. The control system then adjusts the actuator forces in real-time to correct any deviations from the desired alignment, ensuring precise deposited layer alignment is maintained throughout the deposition process.
3Stability of the object's composition
If actuators are added to counteract gravity, then mask stability is improved, but device complexity increases
Solution Approach 1:
The mask arrangement is divided into discrete frame elements that can be independently actuated. This segmentation allows targeted application of counteracting forces only where needed, rather than requiring a complex system that acts on the entire mask structure, thereby reducing overall system complexity while maintaining stability.
Solution Approach 2:
The system changes the physical state or parameters of the mask frame elements by applying controlled forces through actuators. By adjusting force magnitude and direction as controllable parameters, the system achieves stable mask positioning without requiring fundamentally complex structural modifications, managing complexity through parameter control rather than structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively prevents deformation and maintains the alignment of the mask device with respect to the substrate, enhancing the quality and precision of the deposited layers.
Implementation Method 1
the force of gravity can lead to a deformation or bending of the mask arrangement
Implementation Method 2
the at least one actuator is configured to apply a force to the at least one frame element
Data Source
AI summary
A mask arrangement for masking a substrate in a processing chamber is provided. The mask arrangement includes a mask frame having one or more frame elements and is configured to support a mask device, wherein the mask device is connectable to the mask frame; and at least one actuator connectable to at least one frame element of the one or more frame elements, wherein the at least one actuator is configured to apply a force to the at least one frame element.