Vertical Mask Layout for Accurate Laser Irradiation
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Solution Overview
Problem
Larger masks used in laser irradiation apparatuses and exposure apparatuses deflect due to self-weight, leading to reduced processing accuracy and increased particle adhesion, which complicates alignment and increases handling difficulties.
Innovation Solution
Install masks vertically within the apparatus, with a ratio of the longest side to thickness of the effective area being 100 or more, and arrange two opposing sides of the mask vertically to the installation surface to suppress deflection and particle adhesion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the mask size is increased to cover larger processing areas, then the processing area is improved, but the mask deflects downward significantly due to self-weight, degrading image performance and processing accuracy
Solution Approach 1:
The mask is rotated from a horizontal arrangement to a vertical arrangement, changing the spatial dimension in which the mask is positioned. This vertical orientation allows the mask to extend in the vertical direction while maintaining structural stability, enabling large processing areas without significant deflection under self-weight.
2Strength
If the mask thickness is increased to suppress deflection, then the rigidity is improved, but the mask weight significantly increases, degrading handling performance
Solution Approach 1:
By rotating the mask to a vertical arrangement, the mask can achieve sufficient rigidity through its vertical extension rather than increasing thickness. The vertical orientation provides structural support that maintains rigidity while keeping the mask thin and lightweight.
3Ease of manufacture
If the mask is arranged horizontally to align with the installation surface, then the installation is simplified, but the mask deflects downward due to self-weight, reducing processing accuracy
Solution Approach 1:
The mask arrangement is changed from horizontal to vertical, rotating it 90 degrees around the optical axis. This vertical arrangement eliminates downward deflection while maintaining alignment with the installation surface, as the mask now extends vertically rather than horizontally.
4Ease of operation
If the mask thickness is reduced to improve handling performance, then the handling ease is improved, but the mask becomes more flexible and prone to deflection, reducing processing accuracy
Solution Approach 1:
By arranging the mask vertically, thin masks can maintain their flexibility for easy handling while the vertical orientation provides structural stability that prevents deflection during operation, ensuring processing accuracy is maintained.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables highly accurate laser irradiation with reduced apparatus height and lower installation costs by preventing mask deflection and particle adhesion, facilitating easy handling and efficient laser energy use.
Implementation Method 1
a laser beam with high resolution and high energy density is effective
Implementation Method 2
a mask having a pattern corresponding to a laser irradiating region of the body to be irradiated
Data Source
Figure 1(a)~1(d)
Figure 2~3
Figure 4~5(b)
AI summary
The present invention is a laser irradiation apparatus for irradiating a body to be irradiated with a laser through a mask installed in a second optical functional unit. This laser irradiation apparatus includes a first optical functional unit including a laser source, and the second optical functional unit for installing the mask having a pattern corresponding to a laser irradiating region of the body to be irradiated. In this apparatus, the mask includes an effective area having the pattern corresponding to the laser irradiating region of the body to be irradiated, and among four sides forming an outer edge of the mask, which is rectangular. Moreover, a ratio of a length of a longest side to the thickness of the effective area in a laser transmission direction (length / thickness) is 100 or more. In the second optical functional unit, the mask is arranged such that two opposing sides among the four sides forming the outer edge of the mask are approximately vertical to a surface on which the laser irradiation apparatus is installed. This provides the laser irradiation apparatus having a low height, in which an effect of a deflection due to self-weight of the mask is suppressed, thereby enabling highly accurate laser irradiation, and suppressing adhesion of particles on the mask surface, which reduces a defect caused by the particles.