Vertical Memory Strings with Individually Biasable Channels

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Solution Overview

Problem

Current NAND memory devices face challenges in increasing memory density while maintaining reliability, as reducing feature size increases the risk of tunnel dielectric failure and charge leakage, and stacking layers becomes costly and complex.

Innovation Solution

The implementation of a vertical memory array structure where each memory cell in a NAND string shares a common control gate but has individually biasable channel regions, formed using an alternating structure of semiconductor materials with different conductivity types, allowing for selective activation of memory cells.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If feature size is reduced to increase memory density, then memory density is improved, but the risk of tunnel dielectric failure and charge leakage increases

Engineering Contradiction:
Improvememory densityVSAvoidtunnel dielectric reliability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent divides the memory array into multiple independently biasable channel regions within vertical NAND strings. Each channel region can be selectively activated or deactivated, allowing the system to segment the memory operation into smaller, more reliable units. This segmentation reduces the stress on any single tunnel dielectric layer while maintaining high overall memory density through the vertical architecture.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from planar memory architecture to vertical NAND strings, moving the memory structure into the third dimension. This vertical stacking allows memory density to increase without proportionally reducing feature size, thereby maintaining tunnel dielectric thickness and reliability while achieving higher memory capacity per unit area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If multiple layers of memory arrays are stacked to increase density, then memory density is improved, but manufacturing complexity and cost increase

Engineering Contradiction:
Improvememory densityVSAvoidmanufacturing complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent merges multiple memory cells into shared NAND strings with common control gates. Instead of fully independent memory cell structures, multiple cells share control gate electrodes and channel regions, reducing the number of discrete components that need to be manufactured and assembled. This merging approach simplifies the manufacturing process while maintaining high memory density through vertical stacking.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The control gate structures serve multiple functions: they control multiple memory cells simultaneously, provide individual biasing capability for each channel region, and enable selective activation of specific memory cells within a NAND string. This multi-functionality reduces the need for additional specialized structures, simplifying manufacturing while achieving high memory density.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Device complexity

If memory cells share a common control gate to simplify structure, then device complexity is reduced, but selective access to individual memory cells becomes difficult

Engineering Contradiction:
Improvecontrol gate structure complexityVSAvoidselective cell access
Core Design Contradiction:
Device complexityVSEase of operation

Solution Approach 1:

The patent applies local quality by providing individual biasing capability to each channel region associated with a common control gate. While the control gate structure itself is shared and simplified, each channel region can receive distinct voltage biases, enabling selective activation of specific memory cells. This local differentiation in biasing conditions allows precise cell selection without complicating the overall control gate architecture.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent introduces dynamic biasing control where channel regions can be individually activated or deactivated through time-varying voltage applications. The selective access is achieved by dynamically adjusting the bias conditions of different channel regions during read and write operations, allowing flexible and precise memory cell selection while maintaining a simplified static control gate structure.

Inventive Principle:
Principle #15Dynamics

Data Source

PatentUS8687426B2Multi-semiconductor material vertical memory strings, strings of memory cells having individually biasable channel regions, memory arrays incorporating such strings, and methods of accesssing and forming the same
Publication Date: 2014.04.01 MICRON TECHNOLOGY INC
  • US8687426B2 patent drawing
  • US8687426B2 patent drawing
  • US8687426B2 patent drawing

AI summary

Multi-semiconductor vertical memory strings, strings of memory cells having individually biasable channel regions, arrays incorporating such strings and methods for forming and accessing such strings are provided. For example non-volatile memory devices are disclosed that utilize NAND strings of serially-connected non-volatile memory cells. One such string can include two or more serially connected non-volatile memory cells each having a channel region. Each memory cell of the two or more serially connected non-volatile memory cells shares a common control gate and each memory cell of the two or more serially connected non-volatile memory cells is configured to receive an individual bias to its channel region.