Vertical Memory Cell String With Oxygen Vacancy Resistance Switching

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Solution Overview

Problem

There is a need for a nonvolatile memory device with high-density and low-power characteristics that enables random access to memory cells, particularly in the context of three-dimensional NAND structures used in neuromorphic computing platforms.

Innovation Solution

A vertical nonvolatile memory device is designed with a memory cell string that includes a dielectric film composed of a mixture of a semiconductor layer and a transition metal oxide, featuring movable oxygen vacancies to change resistance states based on voltage applications.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a three-dimensional vertical NAND structure is used to increase storage density, then storage capacity is improved, but power consumption increases and random access capability deteriorates

Engineering Contradiction:
Improvestorage densityVSAvoidpower consumption
Core Design Contradiction:
Quantity of substanceVSUse of energy by moving object

Solution Approach 1:

The patent changes the physical state and electrical parameters of oxygen vacancies in the dielectric film to achieve resistance switching. By controlling the position and concentration of oxygen vacancies through voltage application, the memory device achieves low-power operation with distinct resistance states for data storage, directly addressing the power consumption issue in 3D NAND structures

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite structure combining a semiconductor layer with a dielectric film containing transition metal oxide nanoparticles. This composite material system enables oxygen vacancy formation and movement, creating resistive switching behavior that reduces power consumption while maintaining high-density storage capability in the vertical architecture

Inventive Principle:
Principle #40Composite materials

2Quantity of substance

If a three-dimensional vertical NAND structure is used to increase storage density, then storage capacity is improved, but random access capability deteriorates

Engineering Contradiction:
Improvestorage densityVSAvoidrandom access capability
Core Design Contradiction:
Quantity of substanceVSEase of operation

Solution Approach 1:

The patent segments the memory cell structure into distinct functional layers including semiconductor layers, dielectric films with oxygen vacancies, and resistance change layers. This segmentation allows independent control of each layer through word lines and bit lines, enabling random access to specific memory cells in the 3D vertical structure without affecting other cells

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies local quality by creating spatially varying oxygen vacancy distributions in the dielectric film. By applying voltages to specific word lines and bit lines, oxygen vacancies are localized to particular regions, enabling selective resistance changes in targeted memory cells and achieving random access capability in the vertical architecture

Inventive Principle:
Principle #3Local quality

3Use of energy by moving object

If a dielectric film with movable oxygen vacancies is used to achieve low power consumption, then power efficiency is improved, but device complexity increases

Engineering Contradiction:
Improvepower efficiencyVSAvoiddevice complexity
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The patent merges the dielectric film and resistance change layer into a unified structure where oxygen vacancies in the dielectric film directly control resistance states. This integration eliminates the need for separate control mechanisms, reducing device complexity while maintaining low-power operation through oxygen vacancy movement

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent implements self-service by utilizing the inherent oxygen vacancy formation and movement properties of the dielectric film material. The material automatically forms conductive filaments through oxygen vacancy migration when voltage is applied, eliminating the need for external control circuits and reducing overall device complexity while achieving low-power resistive switching

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device achieves high-density storage with low power consumption by utilizing oxygen vacancy movements in the dielectric film to alter resistance states, enabling efficient read, program, and erase operations.

Implementation Method 1

the dielectric film having a plurality of movable oxygen vacancies distributed therein

Methodology Applied
Scientific EffectOxygen vacancy movement: Ion Repulsion/Attraction

Data Source

PatentEP3852144B1Vertical nonvolatile memory device including memory cell string
Publication Date: 2026.03.18 SAMSUNG ELECTRONICS CO LTD
  • EP3852144B1 patent drawingFigure 1
  • EP3852144B1 patent drawingFigure 2
  • EP3852144B1 patent drawingFigure 3

AI summary

A vertical nonvolatile memory device including a memory cell string (CS) using a resistance change material is disclosed. Each memory cell string of the nonvolatile memory device includes a semiconductor layer (522) extending in a first direction and having a first surface opposite a second surface, a plurality of gates (531) and a plurality of insulators (532) alternately arranged in the first direction and extending in a second direction perpendicular to the first direction, a gate insulating layer (521) extending in the first direction between the plurality of gates and the semiconductor layer and between the plurality of insulators and the semiconductor layer, and a dielectric film (523) extending in the first direction on the surface of the semiconductor layer and having a plurality of movable oxygen vacancies distributed therein.